Patents by Inventor Lu-Yuan Lin

Lu-Yuan Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER CLEANING METHOD AND WAFER CLEANING APPARATUS
    Publication number: 20220301892
    Abstract: The present disclosure provides a method of cleaning a wafer and a wafer cleaning apparatus. The method of cleaning a wafer includes: providing a wafer to be cleaned, the surface of the wafer having contaminants; and spraying a surfactant onto the surface of the wafer, and scrubbing the surface of the wafer with a polishing pad to remove the contaminants from the surface of the wafer.
    Type: Application
    Filed: December 6, 2021
    Publication date: September 22, 2022
    Inventors: Shouzhuang Song, Chang-Yi Tsai, Lu-Yuan Lin