Patents by Inventor Lubomir Tuma
Lubomir Tuma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20220199354Abstract: A charged particle beam system can include a vacuum chamber, a specimen holder for holding a specimen within the vacuum chamber, and a charged particle column. The charged particle column can include a charged particle source for producing a beam of charged particles along an optical axis and a magnetic immersion lens for focusing the beam of charged particles. The magnetic immersion lens can include a first lens pole disposed adjacent a first surface of the specimen, an excitation coil surrounding the first lens pole, and a counterpole disposed adjacent a second surface of the specimen, the counterpole including one or more magnets disposed on the counterpole.Type: ApplicationFiled: December 18, 2020Publication date: June 23, 2022Applicant: FEI CompanyInventor: Lubomír Tuma
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Publication number: 20200152416Abstract: The invention relates to a method of determining an aberration of a charged particle microscope. The method comprises a step of providing a charged particle microscope that is at least partly operable by a user. Then, a set of image data is obtained with said charged particle microscope. The image data is processed to determine an aberration of said charged particle microscope. According to the invention, said set of image data is actively obtained by a user. In particular, the image data may be obtained during normal operation of the microscope by a user, which may include navigating and/or focusing of the microscope. Thus, the set of image data is acquired by said user, and not by the controller thereof. This allows background processing of an aberration, and aberration correction during use of the charged particle microscope. The invention further relates to a charged particle microscope incorporating the method.Type: ApplicationFiled: November 11, 2019Publication date: May 14, 2020Applicant: FEI CompanyInventor: Lubomir Tuma
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Patent number: 10134563Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.Type: GrantFiled: November 12, 2015Date of Patent: November 20, 2018Assignee: FEI CompanyInventors: Jacob Simon Faber, Lubomir Tuma, Timothy Burnett, Libor Novak
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Publication number: 20180061613Abstract: A charged-particle microscope having a vacuum chamber comprises a specimen holder, a particle-optical column, a detector and an exchangeable column extending element. The specimen holder is for holding a specimen. The particle-optical column is for producing and directing a beam of charged particles along an axis so as to irradiate the specimen. The column has a terminal pole piece at an extremity facing the specimen holder. The detector is for detecting a flux of radiation emanating from the specimen in response to irradiation by the beam. The exchangeable column extending element is magnetically mounted on the pole piece in a space between the pole piece and the specimen holder. Methods of using the microscope are also disclosed.Type: ApplicationFiled: August 22, 2017Publication date: March 1, 2018Inventors: Bohuslav Sed'a, Lubomír Tuma, Petr Hlavenka, Marek Uncovský, Radovan Vasina, Jan Trojek, Mostafa Maazouz
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Patent number: 9741527Abstract: A specimen holder for a Charged Particle Microscope is disclosed. The holder has a support structure with an elongated member including a specimen mounting zone. The specimen mounting zone comprises a rotor with an axis perpendicular to the elongated member with a paddle connected to it which may be rotated. Specimens may be mounted on the paddle so that rotation of the paddle allows specimens to be rotated and/or inverted for microscopic observation on both sides. Specimens may either be directly mounted on the paddle, or on a grid, half-moon grid, lift-out grid, aperture frame, dielectric film, etc.Type: GrantFiled: December 21, 2015Date of Patent: August 22, 2017Assignee: FEI CompanyInventors: Tomas Vystavel, Josef Sestak, Pavel Poloucek, Lubomir Tuma, Michal Hrouzek, Tomas Trnkocy, Martin Cafourek
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Patent number: 9741525Abstract: A method of producing a corrected beam of charged particles for use in a charged-particle microscope, comprising the following steps: Providing a non-monoenergetic input beam of charged particles; Passing said input beam through an optical module comprising a series arrangement of: A stigmator, thereby producing an astigmatism-compensated, energy-dispersed intermediate beam with a particular monoenergetic line focus direction; A beam selector, comprising a slit that is rotationally oriented so as to match a direction of the slit to said line focus direction, thereby producing an output beam comprising an energy-discriminated portion of said intermediate beam.Type: GrantFiled: July 25, 2016Date of Patent: August 22, 2017Assignee: FEI CompanyInventors: Bohuslav Sed'a, Lubomir Tuma, Alexander Henstra
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Publication number: 20170221673Abstract: A method of producing a corrected beam of charged particles for use in a charged-particle microscope, comprising the following steps: Providing a non-monoenergetic input beam of charged particles; Passing said input beam through an optical module comprising a series arrangement of: A stigmator, thereby producing an astigmatism-compensated, energy-dispersed intermediate beam with a particular monoenergetic line focus direction; A beam selector, comprising a slit that is rotationally oriented so as to match a direction of the slit to said line focus direction, thereby producing an output beam comprising an energy-discriminated portion of said intermediate beam.Type: ApplicationFiled: July 25, 2016Publication date: August 3, 2017Applicant: FEI CompanyInventors: Bohuslav Sed'a, Lubomir Tuma, Alexander Henstra
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Publication number: 20160181059Abstract: A specimen holder for a Charged Particle Microscope, comprising: A support structure; An elongated member, a first end of which is connected to said support structure and the second end of which comprises a specimen mounting zone, the member having a longitudinal axis that extends along its length between said first and second ends, wherein said specimen mounting zone comprises: A rotor that is rotatable about a transverse axis extending substantially perpendicular to said longitudinal axis; A paddle connected to said rotor so as to be rotatable about said transverse axis, the paddle comprising a specimen mounting area; Driving means connected to said rotor, which can be invoked to rotate said paddle through a rotational range that allows the paddle to be inverted relative to an initial orientation thereof.Type: ApplicationFiled: December 21, 2015Publication date: June 23, 2016Applicant: FEI CompanyInventors: Tomas Vystavel, Josef Sestak, Pavel Poloucek, Lubomir Tuma, Michal Hrouzek, Tomas Trnkocy, Martin Cafourek
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Publication number: 20160133436Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.Type: ApplicationFiled: November 12, 2015Publication date: May 12, 2016Applicant: FEI CompanyInventors: Jacob Simon Faber, Lubomir Tuma, Timothy Burnett, Libor Novak
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Publication number: 20140361165Abstract: The invention relates to a dual beam apparatus equipped with an ion beam column and an electron beam column having an electrostatic immersion lens. When tilting the sample, the electrostatic immersion field is distorted and the symmetry round the electron optical axis is lost. As a consequence tilting introduces detrimental effects such as traverse chromatic aberration and beam displacement. Also in-column detectors, detecting either secondary electrons or backscattered electrons in the non-tilted position of the sample, will, due to the loss of the symmetry of the immersion field, show a mix of these electrons when tilting the sample. The invention shows how, by biasing the stage with respect to the grounded electrodes closest to the sample, these disadvantages are eliminated, or at least reduced.Type: ApplicationFiled: June 3, 2014Publication date: December 11, 2014Applicant: FEI CompanyInventors: Bohuslav Sed'a, Lubomír Tùma, Petr Hlavenka, Petr Sytar
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Publication number: 20140110597Abstract: The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.Type: ApplicationFiled: October 22, 2013Publication date: April 24, 2014Applicant: FEI CompanyInventors: Lubomir Tuma, Josef Sesták
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Publication number: 20140097341Abstract: The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.Type: ApplicationFiled: August 26, 2013Publication date: April 10, 2014Applicant: FEI CompanyInventors: Lubomír Tuma, Petr Hlavenka, Petr Sytar, Radek Ceska, Bohuslav Sed'a
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Publication number: 20140070098Abstract: The invention relates to a compound objective lens for a Scanning Electron Microscope having a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the lens, the electron beam can be focused on the sample using combinations of excitations of the two lens coils. More BSE information can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis. By tuning the ratio of the excitation of the two lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and the compound lens can be used as an energy selective detector.Type: ApplicationFiled: September 9, 2013Publication date: March 13, 2014Applicant: FEI CompanyInventors: Petr Sytar, Petr Hlavenka, Lubomir Tûma
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Publication number: 20120273677Abstract: The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.Type: ApplicationFiled: April 26, 2012Publication date: November 1, 2012Applicant: FEI CompanyInventors: Lubomir Tuma, Petr Hlavenka, Petr Sytar, Radek Ceska, Bohuslav Sed'a