Patents by Inventor Luc M. Ouellet

Luc M. Ouellet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Curing and passivation of spin on glasses by a plasma process wherein an external polarization field is applied to the substrate
    Patent number: 5270267
    Abstract: A method of producing insulating layers over a semiconductor substrate comprising spinning a film of spin-on-glass (SOG) over a semiconductor substrate, precuring the film of SOG at an elevated temperature sufficient to remove the bulk of solvent and curing the film of SOG in a plasma in a plasma reactor of a type exhibiting a self-biased R.sub.F discharge adjacent the SOG for a period of time sufficient to exclude the bulk of SiOH, organic volatiles and H.sub.2 O from the layer.
    Type: Grant
    Filed: November 19, 1991
    Date of Patent: December 14, 1993
    Assignee: Mitel Corporation
    Inventor: Luc M. Ouellet