Abstract: A power semiconductor device and method of manufacture thereof involving drift layer of a first conductivity type; base layer of a second conductivity type different than the first conductivity type; source region with first conductivity type arranged on a side of the base layer facing away from the drift layer; a first trench extending from the emitter side into the drift layer; an insulated trench gate electrode extending into the first trench; a second trench being arranged on a side of a first trench facing away from the source region; an electrically conductive layer extending into the second trench and electrically insulated from the base layer and the drift layer. A portion of the base layer extends from the emitter side at least as deep in the vertical direction towards the collector side as the at least one second trench.

Abstract: A semiconductor device a first semiconductor layer of a first conductivity type at a first main side of a semiconductor wafer and a second semiconductor layer of a second conductivity type at second main side. The second semiconductor layer forms a pn junction with the first semiconductor layer. A first electrode is in ohmic contact with the first semiconductor layer and a second electrode layer is in ohmic contact with the second semiconductor layer. A first semiconductor region of the first conductivity type completely embedded in the second semiconductor layer and a second semiconductor region of the first conductivity type completely embedded in the second semiconductor layer.

Abstract: An insulated gate bipolar transistor includes a source electrode, a collector electrode, a source layer, a base layer, a drift layer and a collector layer. Trench gate electrodes extend through the base layer into the drift layer. A channel is located between the source layer, the base layer and the drift layer. A trench Schottky electrode is adjacent to one of the trench gate electrodes and includes an electrically conductive Schottky layer arranged lateral to the base layer and extends through the base layer into the drift layer. The Schottky layer is electrically connected to the source electrode. Collection areas are located in the drift layer at a respective trench gate electrode bottom of the trench gate electrodes or of the trench Schottky electrode. The Schottky layer forms a Schottky contact to the collection area at a contact area.

Abstract: An insulated gate power semiconductor device (1a), comprises in an order from a first main side (20) towards a second main side (27) opposite to the first main side (20) a first conductivity type source layer (3), a second conductivity type base layer (4), a first conductivity type enhancement layer (6) and a first conductivity type drift layer (5). The insulated gate power semiconductor device (1a) further comprises two neighbouring trench gate electrodes (7) to form a vertical MOS cell sandwiched between the two neighbouring trench gate electrodes (7). At least a portion of a second conductivity type protection layer (8a) is arranged in an area between the two neighbouring trench gate electrodes (7), wherein the protection layer (8a) is separated from the gate insulating layer (72) by a first conductivity type channel layer (60a; 60b) extending along the gate insulating layer (72).

Abstract: An insulated gate power semiconductor device (1a), comprises in an order from a first main side (20) towards a second main side (27) opposite to the first main side (20) a first conductivity type source layer (3), a second conductivity type base layer (4), a first conductivity type enhancement layer (6) and a first conductivity type drift layer (5). The insulated gate power semiconductor device (1a) further comprises two neighbouring trench gate electrodes (7) to form a vertical MOS cell sandwiched between the two neighbouring trench gate electrodes (7). At least a portion of a second conductivity type protection layer (8a) is arranged in an area between the two neighbouring trench gate electrodes (7), wherein the protection layer (8a) is separated from the gate insulating layer (72) by a first conductivity type channel layer (60a; 60b) extending along the gate insulating layer (72).

Abstract: An insulated gate power semiconductor device includes an (n-) doped drift layer between an emitter side and a collector side. A p doped protection pillow covers a trench bottom of a trench gate electrode. An n doped enhancement layer having a maximum enhancement layer doping concentration in an enhancement layer depth separates the base layer from the drift layer. An n doped plasma enhancement layer having a maximum plasma enhancement layer doping concentration covers an edge region between the protection pillow and the trench gate electrode. The N doping concentration decreases from the maximum enhancement layer doping concentration towards the plasma enhancement layer and the N doping concentration decreases from the maximum plasma enhancement layer doping concentration towards the enhancement layer such that the N doping concentration has a local doping concentration minimum between the enhancement layer and the plasma enhancement layer.

Abstract: An insulated gate power semiconductor device includes an (n?) doped drift layer between an emitter side and a collector side. A p doped protection pillow covers a trench bottom of a trench gate electrode. An n doped enhancement layer having a maximum enhancement layer doping concentration in an enhancement layer depth separates the base layer from the drift layer. An n doped plasma enhancement layer having a maximum plasma enhancement layer doping concentration covers an edge region between the protection pillow and the trench gate electrode. The n doping concentration decreases from the maximum enhancement layer doping concentration towards the plasma enhancement layer and the n doping concentration decreases from the maximum plasma enhancement layer doping concentration towards the enhancement layer such that the n doping concentration has a local doping concentration minimum between the enhancement layer and the plasma enhancement layer.

Abstract: An insulated gate power semiconductor device has an (n?) doped drift layer between an emitter side and a collector side. A trench gate electrode has a trench bottom and trench lateral sides and extends to a trench depth. A p doped first protection pillow covers the trench bottom. An n doped second protection pillow encircles the trench gate electrode at its trench lateral sides. The second protection pillow has a maximum doping concentration in a first depth, which is at least half the trench depth, wherein a doping concentration of the second protection pillow decreases towards the emitter side from the maximum doping concentration to a value of not more than half the maximum doping concentration. An n doped enhancement layer has a maximum doping concentration in a second depth, which is lower than the first depth, wherein the doping concentration has a local doping concentration minimum between the second depth and the first depth.

Abstract: An insulated gate power semiconductor device has an (n?) doped drift layer between an emitter side and a collector side. A trench gate electrode has a trench bottom and trench lateral sides and extends to a trench depth. A p doped first protection pillow covers the trench bottom. An n doped second protection pillow encircles the trench gate electrode at its trench lateral sides. The second protection pillow has a maximum doping concentration in a first depth, which is at least half the trench depth, wherein a doping concentration of the second protection pillow decreases towards the emitter side from the maximum doping concentration to a value of not more than half the maximum doping concentration. An n doped enhancement layer has a maximum doping concentration in a second depth, which is lower than the first depth, wherein the doping concentration has a local doping concentration minimum between the second depth and the first depth.

Abstract: The present invention concerns a semiconductor tunneling Field-Effect device including a source, a drain, at least one elongated semiconductor structure extending in an elongated direction, a first gate, and a second gate. The first gate has a length extending in said elongated direction and is positioned on a first side of the at least one elongated semiconductor structure, and the second gate has a length extending in said elongated direction and is positioned on a second opposing side of the at least one elongated semiconductor structure. The first and second gates extend along the first and second sides of the at least one elongated semiconductor structure to define an overlap zone sandwiched between the first gate and the second gate, said overlap zone extending the full length of the first and/or second gate along the at least one elongated semiconductor structure.

Abstract: The present invention concerns a semiconductor tunneling Field-Effect device including a source, a drain, at least one elongated semiconductor structure extending in an elongated direction, a first gate, and a second gate. The first gate has a length extending in said elongated direction and is positioned on a first side of the at least one elongated semiconductor structure, and the second gate has a length extending in said elongated direction and is positioned on a second opposing side of the at least one elongated semiconductor structure. The first and second gates extend along the first and second sides of the at least one elongated semiconductor structure to define an overlap zone sandwiched between the first gate and the second gate, said overlap zone extending the full length of the first and/or second gate along the at least one elongated semiconductor structure.