Patents by Inventor Lucas A. Fumagalli

Lucas A. Fumagalli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240136391
    Abstract: A microelectronic device comprises an access device comprising a source region and a drain region spaced from the source region, an insulative material vertically adjacent to the access device, and a capacitor within the insulative material and in electrical communication with the access device. The capacitor comprises a material comprising silicon oxynitride or titanium silicon nitride over surfaces of the insulative material, a first electrode comprising titanium nitride on the material, a dielectric material over the first electrode, and a second electrode on the dielectric material. Related methods of forming the microelectronic device and an electronic system including the microelectronic devices are also described.
    Type: Application
    Filed: October 18, 2022
    Publication date: April 25, 2024
    Inventors: Sanket S. Kelkar, Michael Mutch, Luca Fumagalli, Hisham Abdussamad Abbas, Brenda D. Kraus, Dojun Kim, Christopher W. Petz, Darwin Franseda Fan
  • Patent number: 11923305
    Abstract: Some embodiments include an apparatus having a structure with a surface which comprises tungsten. The apparatus has titanium-nitride-containing protective material along and directly against the surface. The structure may be a digit line of a memory array. Some embodiments include a method in which an assembly is formed to have a tungsten-containing layer with an exposed tungsten-containing upper surface. Titanium-nitride-containing protective material is formed over and directly against the tungsten-containing upper surface. Additional material is formed over the protective material, and is spaced from the tungsten-containing upper surface by the protective material. The additional material may comprise silicon nitride and/or silicon dioxide.
    Type: Grant
    Filed: October 21, 2020
    Date of Patent: March 5, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Luca Fumagalli, Davide Colombo
  • Publication number: 20240074153
    Abstract: Methods, apparatuses, and systems related to conductive structures are described. An example conductive structure includes a first conductive material including a conductive metal nitride, where the first conductive material has a thickness of at least 0.5 nanometers, and a second conductive material including a conductive metal, where the second conductive material is disposed on a first surface of the first conductive material.
    Type: Application
    Filed: August 25, 2022
    Publication date: February 29, 2024
    Inventors: Daniel Billingsley, Jaydip Guha, Marko Milojevic, Sau Ha Cheung, Luca Fumagalli
  • Patent number: 11915777
    Abstract: Some embodiments include an integrated assembly having first and second source/drain regions laterally offset from one another. Metal silicide is adjacent to lateral surfaces of the source/drain regions. Metal is adjacent to the metal silicide. Container-shaped first and second capacitor electrodes are coupled to the source/drain regions through the metal silicide and the metal. Capacitor dielectric material lines interior surfaces of the container-shaped first and second capacitor electrodes, A shared capacitor electrode extends vertically between the first and second capacitor electrodes, and extends into the lined first and second capacitor electrodes. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: February 10, 2022
    Date of Patent: February 27, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Che-Chi Lee, Terrence B. McDaniel, Kehao Zhang, Albert P. Chan, Clement Jacob, Luca Fumagalli, Vinay Nair
  • Publication number: 20240038588
    Abstract: A method of forming a microelectronic device comprises forming interlayer dielectric material over a base structure comprising semiconductive structures separated from one another by insulative structures. Sacrificial line structures separated from one another by trenches are formed over the interlayer dielectric material. The sacrificial line structures horizontally overlap some of the semiconductive structures, and the trenches horizontally overlap some other of the semiconductive structures. Plug structures are formed within horizontal areas of the trenches and extend through the interlayer dielectric material and into the some other of the semiconductive structures. The sacrificial line structures are replaced with additional trenches. Conductive contact structures are formed within horizontal areas of the additional trenches and extend through the interlayer dielectric material and into the some of the semiconductive structures.
    Type: Application
    Filed: July 27, 2022
    Publication date: February 1, 2024
    Inventors: Terrence B. McDaniel, Vinay Nair, Russell A. Benson, Christopher W. Petz, Si-Woo Lee, Silvia Borsari, Ping Chieh Chiang, Luca Fumagalli
  • Publication number: 20230363297
    Abstract: Techniques for semiconductor devices including amorphous silicon are disclosed. In the illustrative embodiment, trenches are etched through several layers of a memory during manufacture, including through a phase-change layer. To protect the phase-change layer during further processing steps, amorphous silicon is applied to the phase-change layer using low-temperature chemical vapor deposition, which can be done without exceeding the melting point of the phase-change layer. The amorphous silicon can be oxidized, forming a protective silicon oxide layer around the phase-change layer.
    Type: Application
    Filed: May 3, 2022
    Publication date: November 9, 2023
    Applicant: Intel Corporation
    Inventors: Luca Fumagalli, Errol Todd Ryan, Jing Yuwen, David M. Fryauf
  • Publication number: 20220358971
    Abstract: Some embodiments include an integrated assembly having first and second source/drain regions laterally offset from one another. Metal silicide is adjacent to lateral surfaces of the source/drain regions. Metal is adjacent to the metal silicide. Container-shaped first and second capacitor electrodes are coupled to the source/drain regions through the metal silicide and the metal. Capacitor dielectric material lines interior surfaces of the container-shaped first and second capacitor electrodes, A shared capacitor electrode extends vertically between the first and second capacitor electrodes, and extends into the lined first and second capacitor electrodes. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: February 10, 2022
    Publication date: November 10, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Che-Chi Lee, Terrence B. McDaniel, Kehao Zhang, Albert P. Chan, Clement Jacob, Luca Fumagalli, Vinay Nair
  • Publication number: 20220302032
    Abstract: A microelectronic device includes a first conductive structure, a barrier structure, a conductive liner structure, and a second conductive structure. The first conductive structure is within a first filled opening in a first dielectric structure. The barrier structure is within the first filled opening in the first dielectric structure and vertically overlies the first conductive structure. The conductive liner structure is on the barrier structure and is within a second filled opening in a second dielectric structure vertically overlying the first dielectric structure. The second conductive structure vertically overlies and is horizontally surrounded by the conductive liner structure within the second filled opening in the second dielectric structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Application
    Filed: June 10, 2022
    Publication date: September 22, 2022
    Inventors: Jordan D. Greenlee, Christian George Emor, Luca Fumagalli, John D. Hopkins, Rita J. Klein, Christopher W. Petz, Everett A. McTeer
  • Patent number: 11393756
    Abstract: A microelectronic device includes a first conductive structure, a barrier structure, a conductive liner structure, and a second conductive structure. The first conductive structure is within a first filled opening in a first dielectric structure. The barrier structure is within the first filled opening in the first dielectric structure and vertically overlies the first conductive structure. The conductive liner structure is on the barrier structure and is within a second filled opening in a second dielectric structure vertically overlying the first dielectric structure. The second conductive structure vertically overlies and is horizontally surrounded by the conductive liner structure within the second filled opening in the second dielectric structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: July 19, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Jordan D. Greenlee, Christian George Emor, Luca Fumagalli, John D. Hopkins, Rita J. Klein, Christopher W. Petz, Everett A. McTeer
  • Patent number: 11378393
    Abstract: An apparatus and a relative method for measuring straightness errors of elongated-shape elements, such as bars, tubes and the like is presented. The measuring apparatus includes a supporting system for a bar, a first detecting system having one or more first sensors to detect the development of the longitudinal axis of the bar, and a central control unit. The measuring apparatus further includes a second detecting system provided with a plurality of second sensors to detect the forces the bar applies to the supporting system and acquiring means to acquire at least one physical parameter of the bar under measuring. The central control unit includes at least one data acquiring and processing module to acquire and process the data detected by said first and second detecting systems and acquired by said acquiring means, in order to determine the possible straightness error of the bar.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: July 5, 2022
    Assignee: Q-TECH S.R.L
    Inventors: Luca Fumagalli, Paolo Tomassini, Diego Tosi, Erika Gregorelli
  • Patent number: 11333133
    Abstract: The present invention relates to linear actuators comprising an electrically-controlled shape memory alloy coil spring (23) suitable to provide linear displacements in valves, switches, lock systems and provided with a crimped terminal at each extremity, each of said crimped terminals comprising a crimping component (21) and an engaging member (22) suitable to mount the spring (23) into the linear actuator. The invention further discloses the use of said spring (23) with particular geometrical characteristics and crimping system assuring the maximization of the available stroke and fatigue life, structural simplicity, low electrical power requirements and thermal inertia, small size.
    Type: Grant
    Filed: March 27, 2020
    Date of Patent: May 17, 2022
    Assignee: SAES GETTERS S.P.A.
    Inventors: Marco Citro, Luca Fumagalli, Matteo Zanella, Michele Scarlata
  • Patent number: 11309315
    Abstract: Systems, methods, and apparatuses are provided for digit line formation for horizontally oriented access devices.
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: April 19, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Terrence B. McDaniel, Si-Woo Lee, Vinay Nair, Luca Fumagalli
  • Patent number: 11282548
    Abstract: Some embodiments include an integrated assembly having first and second source/drain regions laterally offset from one another. Metal silicide is adjacent to lateral surfaces of the source/drain regions. Metal is adjacent to the metal silicide. Container-shaped first and second capacitor electrodes are coupled to the source/drain regions through the metal silicide and the metal. Capacitor dielectric material lines interior surfaces of the container-shaped first and second capacitor electrodes, A shared capacitor electrode extends vertically between the first and second capacitor electrodes, and extends into the lined first and second capacitor electrodes. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: March 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Che-Chi Lee, Terrence B. McDaniel, Kehao Zhang, Albert P. Chan, Clement Jacob, Luca Fumagalli, Vinay Nair
  • Publication number: 20220042498
    Abstract: The present invention relates to linear actuators comprising an electrically-controlled shape memory alloy coil spring (23) suitable to provide linear displacements in valves, switches, lock systems and provided with a crimped terminal at each extremity, each of said crimped terminals comprising a crimping component (21) and an engaging member (22) suitable to mount the spring (23) into the linear actuator. The invention further discloses the use of said spring (23) with particular geometrical characteristics and crimping system assuring the maximization of the available stroke and fatigue life, structural simplicity, low electrical power requirements and thermal inertia, small size.
    Type: Application
    Filed: March 27, 2020
    Publication date: February 10, 2022
    Applicant: SAES GETTERS S.P.A.
    Inventors: Marco CITRO, Luca FUMAGALLI, Matteo ZANELLA, Michele SCARLATA
  • Publication number: 20220037334
    Abstract: Systems, methods, and apparatuses are provided for digit line formation for horizontally oriented access devices.
    Type: Application
    Filed: July 30, 2020
    Publication date: February 3, 2022
    Inventors: Terrence B. McDaniel, Si-Woo Lee, Vinay Nair, Luca Fumagalli
  • Patent number: 11127745
    Abstract: A method of forming an apparatus comprises forming a first metal nitride material over an upper surface of a conductive material within an opening extending through at least one dielectric material through a non-conformal deposition process. A second metal nitride material is formed over an upper surface of the first metal nitride material and side surfaces of the at least one dielectric material partially defining boundaries of the opening through a conformal deposition process. A conductive structure is formed over surfaces of the second metal nitride material within the opening. Apparatuses and electronic systems are also described.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: September 21, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Kentaro Ishii, Yongjun J. Hu, Amirhasan Nourbakhsh, Durai Vishak Nirmal Ramaswamy, Christopher W. Petz, Luca Fumagalli
  • Publication number: 20210287990
    Abstract: A microelectronic device comprises a first conductive structure, a barrier structure, a conductive liner structure, and a second conductive structure. The first conductive structure is within a first filled opening in a first dielectric structure. The barrier structure is within the first filled opening in the first dielectric structure and vertically overlies the first conductive structure. The conductive liner structure is on the barrier structure and is within a second filled opening in a second dielectric structure vertically overlying the first dielectric structure. The second conductive structure vertically overlies and is horizontally surrounded by the conductive liner structure within the second filled opening in the second dielectric structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Application
    Filed: March 16, 2020
    Publication date: September 16, 2021
    Inventors: Jordan D. Greenlee, Christian George Emor, Luca Fumagalli, John D. Hopkins, Rita J. Klein, Christopher W. Petz, Everett A. McTeer
  • Publication number: 20210043579
    Abstract: Some embodiments include an apparatus having a structure with a surface which comprises tungsten. The apparatus has titanium-nitride-containing protective material along and directly against the surface. The structure may be a digit line of a memory array. Some embodiments include a method in which an assembly is formed to have a tungsten-containing layer with an exposed tungsten-containing upper surface. Titanium-nitride-containing protective material is formed over and directly against the tungsten-containing upper surface. Additional material is formed over the protective material, and is spaced from the tungsten-containing upper surface by the protective material. The additional material may comprise silicon nitride and/or silicon dioxide.
    Type: Application
    Filed: October 21, 2020
    Publication date: February 11, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Luca Fumagalli, Davide Colombo
  • Patent number: 10892224
    Abstract: Some embodiments include an apparatus having a structure with a surface which comprises tungsten. The apparatus has titanium-nitride-containing protective material along and directly against the surface. The structure may be a digit line of a memory array. Some embodiments include a method in which an assembly is formed to have a tungsten-containing layer with an exposed tungsten-containing upper surface. Titanium-nitride-containing protective material is formed over and directly against the tungsten-containing upper surface. Additional material is formed over the protective material, and is spaced from the tungsten-containing upper surface by the protective material. The additional material may comprise silicon nitride and/or silicon dioxide.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: January 12, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Luca Fumagalli, Davide Colombo
  • Publication number: 20200340805
    Abstract: An apparatus and a relative method for measuring straightness errors of elongated-shape elements, such as bars, tubes and the like is presented. The measuring apparatus includes a supporting system for a bar, a first detecting system having one or more first sensors to detect the development of the longitudinal axis of the bar, and a central control unit. The measuring apparatus further includes a second detecting system provided with a plurality of second sensors to detect the forces the bar applies to the supporting system and acquiring means to acquire at least one physical parameter of the bar under measuring. The central control unit includes at least one data acquiring and processing module to acquire and process the data detected by said first and second detecting systems and acquired by said acquiring means, in order to determine the possible straightness error of the bar.
    Type: Application
    Filed: October 26, 2018
    Publication date: October 29, 2020
    Applicant: Q-TECH S.R.L.
    Inventors: Luca FUMAGALLI, Paolo TOMASSINI, Diego TOSI, Erika GREGORELLI