Abstract: Methods of forming an array of patterns on a substrate are provided. A replication medium is coated onto a relief structure of a patterned template and solidified. Patterned templates with the replication medium are transferred to an array of sub-regions of a tiling region of a substrate, where heat and/or radiation can be applied to the replication medium. The patterned templates are then removed from the substrate to form a patterned surface structure on the substrate.

Abstract: Methods of forming an array of patterns on a substrate are provided. An array of protective tiles formed from a protectant resin is provided to cover an array of sub-regions on the substrate. An array of patterns is formed on the substrate by sequentially repeating steps (i) and (ii) for each sub-region: (i) removing the protective tile from one of the sub-regions to expose the first major surface underneath; and (ii) forming a pattern on the exposed first major surface within the one of the sub-regions.