Patents by Inventor Lucas Koorneef

Lucas Koorneef has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hermetically sealed elements of an actuator
    Patent number: 7183674
    Abstract: An actuator for positioning of an optical element, such as a mirror, in an optic system that operates under vacuum conditions is provided and includes a first actuator body including a first actuator element that is hermetically sealed in the first actuator body and a second actuator body that includes a second actuator element that is hermetically sealed in the second actuator body. The first and second actuator bodies are hermetically sealed using any number of techniques including a welding process. Moreover, in one embodiment, the actuator operates under the Lorentz principle and the first actuator element is a magnet or magnet assembly and the second actuator element is a coil assembly with the first and second actuator bodies being free of attachment to one another.
    Type: Grant
    Filed: November 6, 2003
    Date of Patent: February 27, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Lucas Koorneef, Joroen van Aert, Frans van Deuren, Sanders Broers
  • Hermetically sealed elements of an actuator
    Publication number: 20050099069
    Abstract: An actuator for positioning of an optical element, such as a mirror, in an optic system that operates under vacuum conditions is provided and includes a first actuator body including a first actuator element that is hermetically sealed in the first actuator body and a second actuator body that includes a second actuator element that is hermetically sealed in the second actuator body. The first and second actuator bodies are hermetically sealed using any number of techniques including a welding process. Moreover, in one embodiment, the actuator operates under the Lorentz principle and the first actuator element is a magnet or magnet assembly and the second actuator element is a coil assembly with the first and second actuator bodies being free of attachment to one another.
    Type: Application
    Filed: November 6, 2003
    Publication date: May 12, 2005
    Inventors: Lucas Koorneef, Jeroen Aert, Frans Deuren, Sander Broers