Patents by Inventor Lucia C. Markert

Lucia C. Markert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Point of use slurry dispensing system
    Patent number: 5478435
    Abstract: A point of use slurry dispensing system with controls for dilution, temperature and oxidizer/etchant/additive infusion. A slurry in unmixed form and a diluting agent are independently pumped to a pad on a CMP tool. Liquid heaters are used to heat the slurry and the diluting agent to a desirable temperature. The actual mixing occurs at the point of use on the pad or in a dispensing line just prior to the point of use. In some instances a third independent distribution line is used to dispense an oxidizer, etchant and/or chemical additive at or near the point of use.
    Type: Grant
    Filed: December 16, 1994
    Date of Patent: December 26, 1995
    Assignees: National Semiconductor Corp., Sematech Inc., AT&T GIS
    Inventors: James J. Murphy, Janos Farkas, Lucia C. Markert, Rahul Jairath