Abstract: A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure, having a first body and a second body, which is capacitively coupled to the first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, a relative displacement between the second body and the first body being detectable from outside; and an amplifier coupled to the microstructure for detecting the relative displacement. DC decoupling elements are arranged between the amplifier and the microstructure.

Abstract: A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.

Abstract: A demodulator includes input terminals, for receiving an input signal, and an amplifier stage having a gain. The input signal is amplitude-modulated and is defined by a carrier signal at a carrier frequency and by a modulating signal. The demodulator includes, moreover, a gain-control stage, coupled to the amplifier stage for varying the gain of the amplifier stage according to a sinusoid of a frequency equal to the carrier frequency, on the basis of the carrier signal.

Abstract: A microelectromechanical gyroscope having a microstructure with a first mass, which can oscillate according to a first axis, and a second mass constrained to the first mass so as to oscillate according to a second axis in response to a rotation of the microstructure, and a driving device coupled to the microstructure to maintain the first mass in oscillation at a resonance frequency, the driving device provided with a low-pass filter having a passband such that the resonance frequency is in the passband and a disturbance frequency associated with disturbance signals due to coupling between the first mass and the second mass is not in the passband.

Abstract: A microelectromechanical gyroscope having a microstructure that includes a first mass and a second mass, wherein the first mass is oscillatable according to a first axis and the second mass is constrained to the first mass so as to be drawn along by the first mass according to the first axis and to oscillate according to a second axis, in response to a rotation of the microstructure, a driving device coupled to the microstructure to maintain the first mass in oscillation at the driving frequency, and a reading device that detects displacements of the second mass according to the second axis. The gyroscope is provided with a self-test actuation system coupled to the second mass for applying an electrostatic force at the driving frequency so as to move the second mass according to the second axis.

Abstract: A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.

Abstract: A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure, having a first body and a second body, which is capacitively coupled to the first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, a relative displacement between the second body and the first body being detectable from outside; and an amplifier coupled to the microstructure for detecting the relative displacement. DC decoupling elements are arranged between the amplifier and the microstructure.

Abstract: A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.

Abstract: A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance frequency. The driving device includes a differential sense amplifier supplying first signals indicative of a velocity of oscillation of the mass, and an actuation and control stage supplying second signals for driving the mass on the basis of the first signals. The driving device moreover includes a filtering circuit of a high-pass type, which is connected between the differential sense amplifier and the actuation and control stage, and has a bandpass that includes the resonance frequency.

Abstract: A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.

Abstract: A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance frequency. The driving device includes a differential sense amplifier supplying first signals indicative of a velocity of oscillation of the mass, and an actuation and control stage supplying second signals for driving the mass on the basis of the first signals. The driving device moreover includes a filtering circuit of a high-pass type, which is connected between the differential sense amplifier and the actuation and control stage, and has a bandpass that includes the resonance frequency.

Abstract: A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.