Patents by Inventor Lucio Flores

Lucio Flores has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTICOMPONENT SACRIFICIAL STRUCTURE
    Publication number: 20120057216
    Abstract: A MEMS comprising a sacrificial structure, which comprises a faster etching portion and a slower etching portion, exhibits reduced damage to structural features when in forming a cavity in the MEMS by etching away the sacrificial structure. The differential etching rates mechanically decouple structural layers, thereby reducing stresses in the device during the etching process. Methods and systems are also provided.
    Type: Application
    Filed: September 28, 2007
    Publication date: March 8, 2012
    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.
    Inventors: Lucio Flores, Lior Kogut, Xiaoming Yan, Thanh Tu, Qi Luo, Brian J. Gally, Dana Chase, Gang Xu, Sheng-Tzung Huang, Chia Wei Yang, Yi Fan Su