Patents by Inventor Ludo Mathussen

Ludo Mathussen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for measuring the image quality of an optical imaging system
    Patent number: 7796274
    Abstract: A measuring system (100) for the optical measurement of an optical imaging system (150), which is provided to image a pattern arranged in an object surface (155) of the imaging system in an image surface (156) of the imaging system, comprises an object-side structure carrier (110) having an object-side measuring structure (111), to be arranged on the object side of the imaging system; an image-side structure carrier (120) having an image-side measuring structure (121), to be arranged on the image side of the imaging system; the object-side measuring structure and the image-side measuring structure being matched to each other in such a way that, when the object-side measuring structure is imaged onto the image-side measuring structure with the aid of the imaging system, a superposition pattern is produced; and a detector (130) for the locally resolving acquisition of the superposition pattern. The imaging system is designed as an immersion system for imaging with the aid of an immersion liquid (171).
    Type: Grant
    Filed: June 2, 2005
    Date of Patent: September 14, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Markus Mengel, Ulrich Wegmann, Albrecht Ehrmann, Wolfgang Emer, Reiner Clement, Ludo Mathussen
  • System for Measuring the Image Quality of an Optical Imaging System
    Publication number: 20080252876
    Abstract: A measuring system (100) for the optical measurement of an optical imaging system (150), which is provided to image a pattern arranged in an object surface (155) of the imaging system in an image surface (156) of the imaging system, comprises an object-side structure carrier (110) having an object-side measuring structure (111), to be arranged on the object side of the imaging system; an image-side structure carrier (120) having an image-side measuring structure (121), to be arranged on the image side of the imaging system; the object-side measuring structure and the image-side measuring structure being matched to each other in such a way that, when the object-side measuring structure is imaged onto the image-side measuring structure with the aid of the imaging system, a superposition pattern is produced; and a detector (130) for the locally resolving acquisition of the superposition pattern. The imaging system is designed as an immersion system for imaging with the aid of an immersion liquid (171).
    Type: Application
    Filed: June 2, 2005
    Publication date: October 16, 2008
    Inventors: Markus Mengel, Ulrich Wegmann, Albrecht Ehrmann, Wolfgang Emer, Reiner Clement, Ludo Mathussen