Patents by Inventor Ludovic BERTHIER

Ludovic BERTHIER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230128033
    Abstract: According to one aspect provision is made of a method for ion implantation in a semiconductor wafer placed in an implantation chamber under vacuum, the semiconductor wafer having an integrated circuit area and a peripheral area around this integrated circuit area, the ion implantation allowing to apply a doping in regions, called implantation regions, of the integrated circuit area, the method comprising: forming a photosensitive resin coating serving as a mask on the semiconductor wafer, then forming openings in the photosensitive resin coating at said implantation regions of the integrated circuit area and at least at one region of the peripheral area, then implanting ions in the semiconductor wafer.
    Type: Application
    Filed: October 12, 2022
    Publication date: April 27, 2023
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Julien BORREL, Alexis GAUTHIER, Fanny HILARIO, Ludovic BERTHIER, Paul DUMAS, Edoardo BREZZA