Abstract: An apparatus for fixing and centering substrates that are each provided with an inner hole is provided. The apparatus has a housing having an axis that extends perpendicular to the plane of a substrate placed on the apparatus. A fixation unit is guided in the housing and is introducible into the inner hole of a substrate. The fixation unit includes an outer element that is moveable along the axis of the housing and relative to the housing, and also includes an inner element that is moveable along the axis of the housing and relative to the housing and to the outer element, which, by way of a relative movement of the inner and outer elements, is expandable for engagement with the inner hole of a substrate.

Abstract: A method and device for the wet processing of substrates in a container are provided. At least one liquid is introduced via at least one liquid inlet into the container. A liquid overflow device is adapted to float on the surface of the liquid in the container. The overflow device is provided with openings for withdrawing liquid from the container. Accompanied by release or flooding of the substrates disposed in the container, the overflow device, together with the surface of the liquid, drops to below the substrates or is raised from the substrates.