Patents by Inventor Luhua Cheng

Luhua Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Double-sided diaphragm micro gas-preconcentrator with a back-on-face configuration
    Patent number: 9726651
    Abstract: A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by stacking an upper silicon substrate with a lower silicon substrate with a back-on-face configuration. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.
    Type: Grant
    Filed: January 9, 2015
    Date of Patent: August 8, 2017
    Assignee: University of Electronic Science and Technology of China
    Inventors: Xiaosong Du, Luhua Cheng, Penglin Wu, Huan Yuan, Yadong Jiang, Ze Wu, Yi Li, Dong Qiu
  • Double-sided Diaphragm Micro Gas-preconcentrator with a Back-on-face Configuration
    Publication number: 20150160172
    Abstract: A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by stacking an upper silicon substrate with a lower silicon substrate with a back-on-face configuration. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.
    Type: Application
    Filed: January 9, 2015
    Publication date: June 11, 2015
    Inventors: Xiaosong Du, Luhua Cheng, Penglin Wu, Huan Yuan, Yadong Jiang, Ze Wu, Yi Li, Dong Qiu