Patents by Inventor Luigi Auzino

Luigi Auzino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for aligning the device layers in a semiconductor device
    Patent number: 5960296
    Abstract: This invention relates to method for forming a semiconductor device on a semiconductor wafer comprising the following steps:forming a plurality of device layers each including a reference mark applied thereon;forming a composite reference mark including one or more features from each of the reference marks applied on the layers which are to be aligned;comparing the reference mark with the features of the marks applied on the or each layer to be aligned in order to identify when the alignment is attained; andforming a next device layer aligned with two or more of said plurality of device layers.
    Type: Grant
    Filed: December 18, 1996
    Date of Patent: September 28, 1999
    Assignee: Texas Instruments Incorporated
    Inventors: Luigi Auzino, Agostino Cangiano