Patents by Inventor Luigi Capodiece

Luigi Capodiece has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optimizing critical dimension uniformity utilizing a resist bake plate simulator
    Patent number: 7334202
    Abstract: A system for optimizing critical dimension uniformity in semiconductor manufacturing processes is provided. The system comprises a bake plate simulator to model a physical bake plate. A finite element analysis engine uses information from the bake plate simulator to calculate missing information. A lithography simulator predicts outcomes of a lithography process using information from the bake plate simulator and the finite element analysis engine. The system can be used in a predictive capacity or as part of a process control system.
    Type: Grant
    Filed: June 3, 2005
    Date of Patent: February 19, 2008
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bhanwar Singh, Qiaolin Zhang, Iraj Emami, Joyce S. Oey Hewett, Luigi Capodiece