Patents by Inventor Luigi G. Amato

Luigi G. Amato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mechanical alignment of substrates to a mask
    Patent number: 9490153
    Abstract: A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.
    Type: Grant
    Filed: July 3, 2014
    Date of Patent: November 8, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Aaron P. Webb, Charles T. Carlson, Michael Honan, Luigi G. Amato, Christopher Neil Grant, James D. Strassner
  • Mechanical Alignment Of Substrates To A Mask
    Publication number: 20150026953
    Abstract: A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.
    Type: Application
    Filed: July 3, 2014
    Publication date: January 29, 2015
    Inventors: Aaron P. Webb, Charles T. Carlson, Michael Honan, Luigi G. Amato, Christopher Neil Grant, James D. Strassner