Abstract: An optical frequency measurement system includes a beam splitter configured to split a light beam into a plurality of measurement beams, including a first measurement beam and a second measurement beam; a first optical frequency measurement subsystem configured to receive the first measurement beam and measure a first frequency of the first measurement beam with a first accuracy range to obtain a first measured frequency that corresponds to a frequency of the light beam; and a second optical frequency measurement subsystem configured to receive the second measurement beam and measure a second frequency of the second measurement beam with a second accuracy range that is narrower than the first accuracy range to obtain a second measured frequency that corresponds to the frequency of the light beam with a higher accuracy than the first measured frequency.