Patents by Inventor Luis J. Bernardez, II

Luis J. Bernardez, II has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources
    Patent number: 6011267
    Abstract: A gas nozzle having an increased resistance to erosion from energetic plasma particles generated by laser plasma sources. By reducing the area of the plasma-facing portion of the nozzle below a critical dimension and fabricating the nozzle from a material that has a high EUV transmission as well as a low sputtering coefficient such as Be, C, or Si, it has been shown that a significant reduction in reflectance loss of nearby optical components can be achieved even after exposing the nozzle to at least 10.sup.7 Xe plasma pulses.
    Type: Grant
    Filed: February 27, 1998
    Date of Patent: January 4, 2000
    Assignee: EUV LLC
    Inventors: Glenn D. Kubiak, Luis J. Bernardez, II