Patents by Inventor Lukas Ferlan

Lukas Ferlan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for monitoring dicing tape tension
    Patent number: 11251097
    Abstract: A method of monitoring a dicing tape tension is described. The method includes acquiring tension data indicative of the dicing tape tension by automated optical inspection of a dicing tape.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: February 15, 2022
    Assignee: Infineon Technologies AG
    Inventors: Walter Leitgeb, Daniel Brunner, Lukas Ferlan
  • Support table, support table assembly, processing arrangement, and methods thereof
    Patent number: 11088009
    Abstract: According to various embodiments, a support table may include: a baseplate including a support structure, the support structure defining a support region over the baseplate to support at least one of a workpiece or a workpiece carrier therein; and one or more light-emitting components disposed between the baseplate and the support region. The one or more light-emitting components are configured to emit light into the support region.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: August 10, 2021
    Assignee: Infineon Technologies AG
    Inventors: Bernhard Goller, Walter Leitgeb, Daniel Brunner, Lukas Ferlan, Markus Ottowitz
  • Method and Device for Monitoring Dicing Tape Tension
    Publication number: 20200286795
    Abstract: A method of monitoring a dicing tape tension is described. The method includes acquiring tension data indicative of the dicing tape tension by automated optical inspection of a dicing tape.
    Type: Application
    Filed: February 25, 2020
    Publication date: September 10, 2020
    Inventors: Walter Leitgeb, Daniel Brunner, Lukas Ferlan
  • Support Table, Support Table Assembly, Processing Arrangement, and Methods Thereof
    Publication number: 20200027774
    Abstract: According to various embodiments, a support table may include: a baseplate including a support structure, the support structure defining a support region over the baseplate to support at least one of a workpiece or a workpiece carrier therein; and one or more light-emitting components disposed between the baseplate and the support region. The one or more light-emitting components are configured to emit light into the support region.
    Type: Application
    Filed: July 17, 2019
    Publication date: January 23, 2020
    Inventors: Bernhard Goller, Walter Leitgeb, Daniel Brunner, Lukas Ferlan, Markus Ottowitz