Patents by Inventor Luke S. Tsai

Luke S. Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTIPLE ZONE PAD CONDITIONING DISK
    Publication number: 20200094375
    Abstract: A pad conditioning disk configured to condition a polishing pad of a chemical mechanical polishing tool including a plurality of zones comprising cutting elements that selectively engage the polishing pad based on a positioning of the plurality of zones, is provided. An associated chemical mechanical polishing (CMP) tool and method for conditioning a polishing pad during a chemical mechanical polishing process is also provided.
    Type: Application
    Filed: September 25, 2019
    Publication date: March 26, 2020
    Inventors: Stan D. Tsai, Luke S. Tsai