Patents by Inventor Lung-Lin YU

Lung-Lin YU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12237373
    Abstract: A device includes a substrate, and a first semiconductor channel over the substrate. The first semiconductor channel includes a first nanosheet of a first semiconductor material, a second nanosheet of a second semiconductor material in physical contact with a topside surface of the first nanosheet, and a third nanosheet of the second semiconductor material in physical contact with an underside surface of the first nanosheet. The first gate structure is over and laterally surrounding the first semiconductor channel, and in physical contact with the second nanosheet and the third nanosheet.
    Type: Grant
    Filed: April 3, 2023
    Date of Patent: February 25, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Lung-Kun Chu, Jia-Ni Yu, Chung-Wei Hsu, Chih-Hao Wang, Kuo-Cheng Chiang, Kuan-Lun Cheng, Mao-Lin Huang
  • Patent number: 12237372
    Abstract: A device includes a substrate, and a first semiconductor channel over the substrate. The first semiconductor channel includes a first nanosheet of a first semiconductor material, a second nanosheet of a second semiconductor material in physical contact with a topside surface of the first nanosheet, and a third nanosheet of the second semiconductor material in physical contact with an underside surface of the first nanosheet. The first gate structure is over and laterally surrounding the first semiconductor channel, and in physical contact with the second nanosheet and the third nanosheet.
    Type: Grant
    Filed: April 3, 2023
    Date of Patent: February 25, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Lung-Kun Chu, Jia-Ni Yu, Chung-Wei Hsu, Chih-Hao Wang, Kuo-Cheng Chiang, Kuan-Lun Cheng, Mao-Lin Huang
  • Patent number: 12237396
    Abstract: Multi-gate devices and methods for fabricating such are disclosed herein. An exemplary method includes forming a gate dielectric layer around first channel layers in a p-type gate region and around second channel layers in an n-type gate region. Sacrificial features are formed between the second channel layers in the n-type gate region. A p-type work function layer is formed over the gate dielectric layer in the p-type gate region and the n-type gate region. After removing the p-type work function layer from the n-type gate region, the sacrificial features are removed from between the second channel layers in the n-type gate region. An n-type work function layer is formed over the gate dielectric layer in the n-type gate region. A metal fill layer is formed over the p-type work function layer in the p-type gate region and the n-type work function layer in the n-type gate region.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: February 25, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jia-Ni Yu, Kuo-Cheng Chiang, Lung-Kun Chu, Chung-Wei Hsu, Chih-Hao Wang, Mao-Lin Huang
  • Patent number: 12206005
    Abstract: A structure has stacks of semiconductor layers over a substrate and adjacent a dielectric feature. A gate dielectric is formed wrapping around each layer and the dielectric feature. A first layer of first gate electrode material is deposited over the gate dielectric and the dielectric feature. The first layer on the dielectric feature is recessed to a first height below a top surface of the dielectric feature. A second layer of the first gate electrode material is deposited over the first layer. The first gate electrode material in a first region of the substrate is removed to expose a portion of the gate dielectric in the first region, while the first gate electrode material in a second region of the substrate is preserved. A second gate electrode material is deposited over the exposed portion of the gate dielectric and over a remaining portion of the first gate electrode material.
    Type: Grant
    Filed: July 28, 2023
    Date of Patent: January 21, 2025
    Assignee: TAIWAN SEMICONDICTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20190350084
    Abstract: A printed circuit board structure includes a printed circuit board having a conductive structure, a dielectric structure and a copper foil layer. The copper foil layer has a first sub-copper foil layer and a second sub-copper foil layer on the printed circuit board. The dielectric structure and the first sub-copper foil layer have an opening. The opening exposes the conductive structure. A conductive bump is on the first sub-copper foil layer and in the opening, and the conductive bump is electrically connected to the conductive structure. A recess is between the first sub-copper foil layer and the second sub-copper foil layer, and the top surface of the second sub-copper foil layer is exposed. A method of forming the structure above is also provided.
    Type: Application
    Filed: August 24, 2018
    Publication date: November 14, 2019
    Inventors: Chin-Yi CHUANG, Min-Huan KUO, Chun-Chien LO, Lung-Lin YU