Abstract: A package structure includes a first carrier, a second carrier, and a first electronic device. The first carrier is electrically connected to a first voltage. The second carrier includes a first substrate and a first interconnect structure. The first substrate is in contact with the first carrier, the first interconnect structure is electrically connected to a second voltage, and the first interconnect structure and the first carrier are deposited on two opposite sides of the first substrate. The first electronic device is deposited on the first interconnect structure and away from the first carrier. The first electronic device is in contact with the first interconnect structure.

Abstract: A micro accelerometer including a plurality of proof masses is provided to detect the acceleration of the first axis, the second axis and the third axis. The disclosed micro accelerometer has the advantages of close loop control, mechanical decoupling, and not relying on high aspect ratio manufacturing technology.

Abstract: A micro angular rate-sensing device is provided. A vibrator, having a plurality of proof masses connected to a ring, is arranged in a first base. Flexible supporting members connect to the vibrator to suspend the vibrator in the first base. Electrodes drive the vibrator to oscillate and control the oscillation mode of the vibrator in driving mode. Planar electrodes are arranged relative to the proof masses on a second base. The motion of the proof masses relative to the planar electrodes is sensed through the capacitance between the proof masses and the planar electrodes. The resonant structure with greater mass of the device generates greater Coriolis force and increases the sensing area. Thus, the intensity of sensed signals and noise-signal ratio are greatly increased. Furthermore, the device does not rely much on high aspect ratio manufacturing technology. Thus the manufacturing cost is reduced and the yield rate is increased.

Abstract: An angular rate sensing device with temperature compensation and vibration compensation is provided. The device includes a base; a vibrator having multiple proof masses, arranged in the base; a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base; and a plurality of planar electrodes arranged relative to the proof masses, wherein each of the planar electrodes is connected to two signal lines with phase difference of 180 degree. The vibration error is compensated by way of connecting the signal lines, whose phase difference is of 0 degree, of the planar electrodes, whose position difference is of 180 degree; wherein the thermal expansion error is compensated by way of connecting the signal lines, whose phase difference is of 180 degree, of the planar electrodes, whose position difference is of 90 degree.

Abstract: A micro accelerometer including a plurality of proof masses is provided to detect the acceleration of the first axis, the second axis and the third axis. The disclosed micro accelerometer has the advantages of close loop control, mechanical decoupling, and not relying on high aspect ratio manufacturing technology.

Abstract: A micro angular rate-sensing device is provided. A vibrator, having a plurality of proof masses connected to a ring, is arranged in a first base. Flexible supporting members connect to the vibrator to suspend the vibrator in the first base. Electrodes drive the vibrator to oscillate and control the oscillation mode of the vibrator in driving mode. Planar electrodes are arranged relative to the proof masses on a second base. The motion of the proof masses relative to the planar electrodes is sensed through the capacitance between the proof masses and the planar electrodes. The resonant structure with greater mass of the device generates greater Coriolis force and increases the sensing area. Thus, the intensity of sensed signals and noise-signal ratio are greatly increased. Furthermore, the device does not rely much on high aspect ratio manufacturing technology. Thus the manufacturing cost is reduced and the yield rate is increased.

Abstract: In order to develop a production type of ring laser gyroscope (RLG), the determination of a laser plane for the assembly of the optical mirrors in a RLG block is needed. The new methods for measuring RLG cavities and for calculating the accuracy of the laser plane are developed. The optimum reflecting points and the error tolerances of the laser beams are obtained by using these methods. The advantages of these new methods are that both the design accuracy and the production time of the RLG block can be reduced as well as the yield rate of RLG could increase.