Patents by Inventor LUNGUO WANG

LUNGUO WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for automatically collecting semiconductor manufacturing parameters
    Patent number: 10031516
    Abstract: A method for automatically collecting semiconductor manufacturing parameters of a manufacturing equipment is provided. The method includes reporting semiconductor manufacturing parameters obtained by self-monitoring of the manufacturing equipment and obtaining storage locations in an electronic data capture corresponding to reported semiconductor manufacturing parameters and transporting the reported semiconductor manufacturing parameters and corresponding storage locations. The method further includes receiving the reported semiconductor manufacturing parameters and the corresponding storage location and storing each reported semiconductor manufacturing parameters automatically into the electronic data capture of a manufacturing execution system according to the corresponding storage location.
    Type: Grant
    Filed: March 27, 2015
    Date of Patent: July 24, 2018
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Ke Xiao, Jimin Zhu, Lunguo Wang, Yunfei Sui, Xueqing Gao
  • METHOD AND SYSTEM FOR AUTOMATICALLY COLLECTING SEMICONDUCTOR MANUFACTURING PARAMETERS
    Publication number: 20150287621
    Abstract: A method for automatically collecting semiconductor manufacturing parameters of a manufacturing equipment is provided. The method includes reporting semiconductor manufacturing parameters obtained by self-monitoring of the manufacturing equipment and obtaining storage locations in an electronic data capture corresponding to reported semiconductor manufacturing parameters and transporting the reported semiconductor manufacturing parameters and corresponding storage locations. The method further includes receiving the reported semiconductor manufacturing parameters and the corresponding storage location and storing each reported semiconductor manufacturing parameters automatically into the electronic data capture of a manufacturing execution system according to the corresponding storage location.
    Type: Application
    Filed: March 27, 2015
    Publication date: October 8, 2015
    Inventors: KE XIAO, JIMIN ZHU, LUNGUO WANG, YUNFEI SUI, XUEQING GAO