Patents by Inventor Lutz Dippmann

Lutz Dippmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge
    Patent number: 8610354
    Abstract: The invention is related to a gas discharge-based radiation source which emits short-wavelength radiation, wherein an emitter is ionized and compressed by pulse-shaped currents between two electrodes arranged in a vacuum chamber and is excited to form an emitting plasma. According to the invention, the plasma is preserved by means of a high-frequency sequence of pulse-shaped currents the pulse repetition period of which is adjusted so as to be shorter than a lifetime of the plasma so that the plasma is kept periodically alternating between a high-energy state of an emitting compressed plasma and a low-energy state of a relaxing plasma. For exciting the relaxing plasma to the compressed plasma, excitation energy is coupled into the relaxing plasma by making use of pulse-shaped currents with repetition frequencies between 50 kHz and 4 MHz and pulse widths equal to the pulse repetition period.
    Type: Grant
    Filed: December 5, 2011
    Date of Patent: December 17, 2013
    Assignee: XTREME technologies GmbH
    Inventors: Max Christian Schuermann, Lutz Dippmann, Juergen Kleinschmidt, Guido Schriever
  • Method and Apparatus for the Generation of Short-Wavelength Radiation by Means of a Gas Discharge-Based High-Frequency, High-Current Discharge
    Publication number: 20120153829
    Abstract: The invention is related to a gas discharge-based radiation source which emits short-wavelength radiation, wherein an emitter is ionized and compressed by pulse-shaped currents between two electrodes arranged in a vacuum chamber and is excited to form an emitting plasma. According to the invention, the plasma is preserved by means of a high-frequency sequence of pulse-shaped currents the pulse repetition period of which is adjusted so as to be shorter than a lifetime of the plasma so that the plasma is kept periodically alternating between a high-energy state of an emitting compressed plasma and a low-energy state of a relaxing plasma. For exciting the relaxing plasma to the compressed plasma, excitation energy is coupled into the relaxing plasma by making use of pulse-shaped currents with repetition frequencies between 50 kHz and 4 MHz and pulse widths equal to the pulse repetition period.
    Type: Application
    Filed: December 5, 2011
    Publication date: June 21, 2012
    Applicant: XTREME TECHNOLOGIES GMBH
    Inventors: Max Christian SCHUERMANN, Lutz DIPPMANN, Juergen KLEINSCHMIDT, Guido SCHRIEVER
  • Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
    Patent number: 7072370
    Abstract: The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: July 4, 2006
    Assignee: XTREME technologies GmbH
    Inventors: Vladimir Korobochko, Denis Bolshukhin, Lutz Dippmann, Spencer Merz, Hubertus Von Bergmann, Juergen Kleinschmidt
  • Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
    Publication number: 20050200304
    Abstract: The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation.
    Type: Application
    Filed: December 22, 2004
    Publication date: September 15, 2005
    Inventors: Vladimir Korobochko, Denis Bolshukhin, Lutz Dippmann, Spencer Merz, Hubertus Bergmann, Juergen Kleinschmidt