Abstract: An arrangement for coating of sheet-like foil substrates having an unwinding roll and a winding roll between which the foil substrate is guided under sheet tension and a coating station arranged in between the rolls, permits vacuum coating of foil substrates in which surpassing of the maximum substrate temperature is prevented and high quality substrate transport is made possible. The coating station has at least two coating sources arranged in the direction of the sheet run one behind the other opposite the coating site of the foil substrate, and a support element that generates a support force resulting from the sheet tension on the back of the foil substrate as force component. The support element is arranged between two adjacent coating sources on the back of the substrate opposite the coating side and the foil substrate is freely tightened between two support elements.

Abstract: A device for vaporizing coating material is disposed in a vacuum chamber as part of a deposition apparatus; the coating material being arranged in a crucible for vaporization purposes. The vaporizing device has an evaporation chamber that is connected, via a vacuum valve, to a loading chamber which can be evacuated while an evaporator is connected to the evaporation chamber at a vapor discharge end, i.e., the end facing the vacuum chamber, via a first vapor stop valve.

Abstract: A thermal vacuum deposition device and method in which a band-shaped substrate is continuously conveyed in a vaporization channel that is charged with a vaporous coating material is characterized in that the vaporization channel is sealed by inserting at least one positionally adjustable hollow element into an outer space of the vaporization channel and an inner space of the vaporization channel when a minimum conveying speed is not attained or when the substrate is at a standstill such that the substrate is located in the inner space.

Abstract: A coating method is provided for thermally vacuum-depositing a continuously conveyed substrate that moves within a deposition channel by vaporizing solid or liquid coating materials and vapor-depositing the vaporized coating material onto the substrate in a deposition device. In order to create a coating conveyed substrate, in which accessibility to the vaporization device is improved while the processes taking place in the deposition chamber and the vaporization device can be controlled independently of each other, at least one evaporation device is located outside the deposition chamber and delivery of steam between the evaporator and the deposition channel is regulated.