Patents by Inventor Lynford Goddard
Lynford Goddard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10734237Abstract: Methods and apparatus for subtractively fabricating three-dimensional structures relative to a surface of a substrate and for additively depositing metal and dopant atoms onto the surface and for diffusing them into the bulk. A chemical solution is applied to the surface of the semiconductor substrate, and a spatial pattern of electron-hole pairs is generated by projecting a spatial pattern of illumination characterized by a specified intensity, wavelength and duration at each pixel of a plurality of pixels on the surface. Charge carriers are driven away from the surface of the semiconductor on a timescale short compared to the carrier recombination lifetime. Such methods are applied to creating a spatially varying doping profile in the semiconductor substrate, a photonic integrated circuit and an integrated photonic microfluidic circuit.Type: GrantFiled: May 22, 2018Date of Patent: August 4, 2020Assignee: The Board of Trustees of the University of IllinoisInventors: Lynford Goddard, Kaiyuan Wang, Chris Edwards, Lonna Edwards, Xin Yu, Gang Logan Liu, Samuel Washington, Shailendra Srivastava, Terry Koker, Julianne Lee, Catherine Britt Carlson
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Patent number: 10416383Abstract: Methods and apparatus for concentrating light into a specified focal volume and for collecting light from a specified volume. Incident light is coupled through a plurality of successive transmissive asymmetric microstructure elements. The succession of transmissive asymmetric microstructure elements may be designed by representing an electromagnetic field as a linear combination of eigenmodes of one of the succession of transmissive asymmetric microstructure elements. The asymmetric microstructure elements are represented as a plurality of mesh lattice units and eigenmode solutions to Maxwell's equations are obtained for each mesh lattice unit subject to consistent boundary conditions. S-matrix formalism is employed to calculate a field output and weighting coefficients for the eigenmodes are selected to achieve a specified set of field output characteristics.Type: GrantFiled: July 12, 2018Date of Patent: September 17, 2019Assignee: The Board of Trustees of the University of IllinoisInventors: Lynford Goddard, Jinlong Zhu
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Publication number: 20190025510Abstract: Methods and apparatus for concentrating light into a specified focal volume and for collecting light from a specified volume. Incident light is coupled through a plurality of successive transmissive asymmetric microstructure elements. The succession of transmissive asymmetric microstructure elements may be designed by representing an electromagnetic field as a linear combination of eigenmodes of one of the succession of transmissive asymmetric microstructure elements. The asymmetric microstructure elements are represented as a plurality of mesh lattice units and eigenmode solutions to Maxwell's equations are obtained for each mesh lattice unit subject to consistent boundary conditions. S-matrix formalism is employed to calculate a field output and weighting coefficients for the eigenmodes are selected to achieve a specified set of field output characteristics.Type: ApplicationFiled: July 12, 2018Publication date: January 24, 2019Inventors: Lynford Goddard, Jinlong Zhu
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Patent number: 10115599Abstract: Methods and apparatus for subtractively fabricating three-dimensional structures relative to a surface of a substrate and for additively depositing metal and dopant atoms onto the surface and for diffusing them into the bulk. A chemical solution is applied to the surface of the semiconductor substrate, and a spatial pattern of electron-hole pairs is generated by projecting a spatial pattern of illumination characterized by a specified intensity, wavelength and duration at each pixel of a plurality of pixels on the surface. An electrical potential is applied across the interface of the semiconductor and the solution with a specified temporal profile relative to the temporal profile of the spatial pattern of illumination. Such methods are applied to the fabrication of a photodetector integral with a parabolic reflector, cell size sorting chips, a three-dimensional photonic bandgap chip, a photonic integrated circuit, and an integrated photonic microfluidic circuit.Type: GrantFiled: January 6, 2016Date of Patent: October 30, 2018Assignee: The Board of Trustees of the University of IllinoisInventors: Lynford Goddard, Kaiyuan Wang, Chris Edwards, Lonna Edwards, Xin Yu, Gang Logan Liu, Terry Koker
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Publication number: 20180301344Abstract: Methods and apparatus for subtractively fabricating three-dimensional structures relative to a surface of a substrate and for additively depositing metal and dopant atoms onto the surface and for diffusing them into the bulk. A chemical solution is applied to the surface of the semiconductor substrate, and a spatial pattern of electron-hole pairs is generated by projecting a spatial pattern of illumination characterized by a specified intensity, wavelength and duration at each pixel of a plurality of pixels on the surface. Charge carriers are driven away from the surface of the semiconductor on a timescale short compared to the carrier recombination lifetime. Such methods are applied to creating a spatially varying doping profile in the semiconductor substrate, a photonic integrated circuit and an integrated photonic microfluidic circuit.Type: ApplicationFiled: May 22, 2018Publication date: October 18, 2018Inventors: Lynford Goddard, Kaiyuan Wang, Chris Edwards, Lonna Edwards, Xin Yu, Gang Logan Liu, Samuel Washington, Shailendra Srivastava, Terry Koker, Julianne Lee, Catherine Britt Carlson
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Patent number: 9880096Abstract: Configurations for in-situ gas detection are provided, and include miniaturized photonic devices, low-optical-loss, guided-wave structures and state-selective adsorption coatings. High quality factor semiconductor resonators have been demonstrated in different configurations, such as micro-disks, micro-rings, micro-toroids, and photonic crystals with the properties of very narrow NIR transmission bands and sensitivity up to 10?9 (change in complex refractive index). The devices are therefore highly sensitive to changes in optical properties to the device parameters and can be tunable to the absorption of the chemical species of interest. Appropriate coatings applied to the device enhance state-specific molecular detection.Type: GrantFiled: October 15, 2015Date of Patent: January 30, 2018Assignee: Lawrence Livermore National Security, LLCInventors: Tiziana C Bond, Garrett Cole, Lynford Goddard
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Patent number: 9377399Abstract: Configurations for in-situ gas detection are provided, and include miniaturized photonic devices, low-optical-loss, guided-wave structures and state-selective adsorption coatings. High quality factor semiconductor resonators have been demonstrated in different configurations, such as micro-disks, micro-rings, micro-toroids, and photonic crystals with the properties of very narrow NIR transmission bands and sensitivity up to 10?9 (change in complex refractive index). The devices are therefore highly sensitive to changes in optical properties to the device parameters and can be tunable to the absorption of the chemical species of interest. Appropriate coatings applied to the device enhance state-specific molecular detection.Type: GrantFiled: November 12, 2012Date of Patent: June 28, 2016Assignee: Lawrence Livermore National Security, LLCInventors: Tiziana C Bond, Garrett Cole, Lynford Goddard
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Publication number: 20160118265Abstract: Methods and apparatus for subtractively fabricating three-dimensional structures relative to a surface of a substrate and for additively depositing metal and dopant atoms onto the surface and for diffusing them into the bulk. A chemical solution is applied to the surface of the semiconductor substrate, and a spatial pattern of electron-hole pairs is generated by projecting a spatial pattern of illumination characterized by a specified intensity, wavelength and duration at each pixel of a plurality of pixels on the surface. An electrical potential is applied across the interface of the semiconductor and the solution with a specified temporal profile relative to the temporal profile of the spatial pattern of illumination. Such methods are applied to the fabrication of a photodetector integral with a parabolic reflector, cell size sorting chips, a three-dimensional photonic bandgap chip, a photonic integrated circuit, and an integrated photonic microfluidic circuit.Type: ApplicationFiled: January 6, 2016Publication date: April 28, 2016Inventors: Lynford Goddard, Kaiyuan Wang, Chris Edwards, Lonna Edwards, Xin Yu, Gang Logan Liu, Samuel Washington, Shailendra Srivastava, Terry Koker, Julianne Lee, Catherine Britt Carlson
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Patent number: 9255791Abstract: Methods and apparatus for method for characterizing a height profile of a scattering surface relative to a fiducial plane. The scattering surface, which may be an interface between distinct solid, liquid, gaseous or plasma phases, is illuminated with substantially spatially coherent light, and light scattered by the scattering surface is collected and dispersed, such as by a grating, into zeroth- and first-order beams. A spatial Fourier transform of the zeroth- and first-order beams is created, and one of the beams is low-pass filtered. The beams are interfered at a focal plane detector to generate an interferogram, which is transformed to retrieve a spatially resolved quantitative phase image and/or an amplitude image of the scattering surface. Imaging may be performed during an etching process, and may be used to adaptively control a photoetching process in a feedback loop.Type: GrantFiled: September 28, 2012Date of Patent: February 9, 2016Assignee: The Board of Trustees of the University of IllinoisInventors: Gabriel Popescu, Lynford Goddard, Chris Edwards, Amir Arbabi
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Publication number: 20160033397Abstract: Configurations for in-situ gas detection are provided, and include miniaturized photonic devices, low-optical-loss, guided-wave structures and state-selective adsorption coatings. High quality factor semiconductor resonators have been demonstrated in different configurations, such as micro-disks, micro-rings, micro-toroids, and photonic crystals with the properties of very narrow NIR transmission bands and sensitivity up to 10?9 (change in complex refractive index). The devices are therefore highly sensitive to changes in optical properties to the device parameters and can be tunable to the absorption of the chemical species of interest. Appropriate coatings applied to the device enhance state-specific molecular detection.Type: ApplicationFiled: October 15, 2015Publication date: February 4, 2016Applicant: Lawrence Livermore National Security, LLCInventors: Tiziana C Bond, Garrett Cole, Lynford Goddard
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Patent number: 8309929Abstract: Compact tunable optical cavities are provided for in-situ NIR spectroscopy. MEMS-tunable VCSEL platforms represents a solid foundation for a new class of compact, sensitive and fiber compatible sensors for fieldable, real-time, multiplexed gas detection systems. Detection limits for gases with NIR cross-sections such as O2, CH4, COx and NOx have been predicted to approximately span from 10ths to 10s of parts per million. Exemplary oxygen detection design and a process for 760 nm continuously tunable VCSELS is provided. This technology enables in-situ self-calibrating platforms with adaptive monitoring by exploiting Photonic FPGAs.Type: GrantFiled: March 18, 2009Date of Patent: November 13, 2012Assignee: Lawrence Livermore National Security, LLC.Inventors: Tiziana Bond, Garrett Cole, Lynford Goddard
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Patent number: 7995892Abstract: A system in one general embodiment includes a waveguide structure comprising a core of an alloy of Group III-V materials surrounded by an oxide (which may include one or more Group III-V metals), wherein an interface of the oxide and core is characterized by oxidation of the alloy for defining the core. A method in one general approach includes oxidizing a waveguide structure comprising an alloy of Group III-V materials for forming a core of the alloy surrounded by an oxide.Type: GrantFiled: May 29, 2008Date of Patent: August 9, 2011Assignee: Lawrence Livermore National Security, LLCInventors: Tiziana Bond, Garrett Cole, Lynford Goddard, Jeff Kallman
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Publication number: 20090303487Abstract: Compact tunable optical cavities are provided for in-situ NIR spectroscopy. MEMS-tunable VCSEL platforms represents a solid foundation for a new class of compact, sensitive and fiber compatible sensors for fieldable, real-time, multiplexed gas detection systems. Detection limits for gases with NIR cross-sections such as O2, CH4, COx and NOx have been predicted to approximately span from 10ths to 10s of parts per million. Exemplary oxygen detection design and a process for 760 nm continuously tunable VCSELS is provided. This technology enables in-situ self-calibrating platforms with adaptive monitoring by exploiting Photonic FPGAs.Type: ApplicationFiled: March 18, 2009Publication date: December 10, 2009Inventors: Tiziana Bond, Garrett Cole, Lynford Goddard
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Publication number: 20080298761Abstract: A system in one general embodiment includes a waveguide structure comprising a core of an alloy of Group III-V materials surrounded by an oxide (which may include one or more Group III-V metals), wherein an interface of the oxide and core is characterized by oxidation of the alloy for defining the core. A method in one general approach includes oxidizing a waveguide structure comprising an alloy of Group III-V materials for forming a core of the alloy surrounded by an oxide.Type: ApplicationFiled: May 29, 2008Publication date: December 4, 2008Inventors: Tiziana Bond, Garret Cole, Lynford Goddard, Jeff Kallman