Patents by Inventor Lynn Caton

Lynn Caton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Waferless boat used as baffle during wafer processing
    Patent number: 6001182
    Abstract: In the course of processing integrated circuits production wafers are placed within a plurality of production boats on a platform. A first baffle boat is placed at a front end of the plurality of production boats. The first baffle boat contains a first plurality of wafers made of quartz. A second baffle boat is placed at a rear end of the plurality of production boats. The second baffle boat contains a second plurality of wafers made of quartz. The plurality of production boats, the first baffle boat and the second baffle boat are placed within a processing chamber.
    Type: Grant
    Filed: June 5, 1997
    Date of Patent: December 14, 1999
    Assignee: VLSI Technology, Inc.
    Inventors: Allen Page, Lynn Caton