Abstract: Reduction or elimination of negative consequences of reflected stray light from lens surfaces is achieved by propagating a laser beam through an eccentric pupil that excludes the optical axis of the system, which is rotationally symmetric. In such systems, stray light reflections eventually are focused onto the unique optical axis of the system, in either a real or virtual focal region. By using an eccentric pupil, all damage due to focusing of the stray light lies outside of the beam. These focal regions can, e.g., be physically blocked to eliminate beam paths that lead to optical damage, re-pulse beams and parasitic lasing.

Abstract: Reduction or elimination of negative consequences of reflected stray light from lens surfaces is achieved by propagating a laser beam through an eccentric pupil that excludes the optical axis of the system, which is rotationally symmetric. In such systems, stray light reflections eventually are focused onto the unique optical axis of the system, in either a real or virtual focal region. By using an eccentric pupil, all damage due to focusing of the stray light lies outside of the beam. These focal regions can, e.g., be physically blocked to eliminate beam paths that lead to optical damage, re-pulse beams and parasitic lasing.

Abstract: A critical illumination condenser system, particularly adapted for use in extreme ultraviolet (EUV) projection lithography based on a ring field imaging system and a laser produced plasma source. The system uses three spherical mirrors and is capable of illuminating the extent of the mask plane by scanning either the primary mirror or the laser plasma source. The angles of radiation incident upon each mirror of the critical illumination condenser vary by less than eight (8) degrees. For example, the imaging system in which the critical illumination condenser is utilized has a 200 .mu.m source and requires a magnification of 26.times.. The three spherical mirror system constitutes a two mirror inverse Cassegrain, or Schwarzschild configuration, with a 25% area obstruction (50% linear obstruction). The third mirror provides the final pupil and image relay. The mirrors include a multilayer reflective coating which is reflective over a narrow bandwidth.

Abstract: A broadband diffractive lens or imaging element produces a sharp focus and/or a high resolution image with broad bandwidth illuminating radiation. The diffractive lens is sectored or segmented into regions, each of which focuses or images a distinct narrowband of radiation but all of which have a common focal length. Alternatively, a serial stack of minus filters, each with a diffraction pattern which focuses or images a distinct narrowband of radiation but all of which have a common focal length, is used. The two approaches can be combined. Multifocal broadband diffractive elements can also be formed. Thin film embodiments are described.

Abstract: A broadband diffractive lens or imaging element produces a sharp focus and/or a high resolution image with broad bandwidth illuminating radiation. The diffractive lens is sectored or segmented into regions, each of which focuses or images a distinct narrowband of radiation but all of which have a common focal length. Alternatively, a serial stack of minus filters, each with a diffraction pattern which focuses or images a distinct narrowband of radiation but all of which have a common focal length, is used. The two approaches can be combined. Multifocal broadband diffractive elements can also be formed.

Abstract: Soft x-ray projection lithography can be performed using x-ray optical components and spherical imaging lenses (mirrors), which form an x-ray reduction camera. The x-ray reduction is capable of projecting a 5x demagnified image of a mask onto a resist coated wafer using 4.5 nm radiation. The diffraction limited resolution of this design is about 135 nm with a depth of field of about 2.8 microns and a field of view of 0.2 cm.sup.2. X-ray reflecting masks (patterned x-ray multilayer mirrors) which are fabricated on thick substrates and can be made relatively distortion free are used, with a laser produced plasma for the source. Higher resolution and/or larger areas are possible by varying the optic figures of the components and source characteristics.

Abstract: A dye laser oscillator in which one light beam is used to pump a continuous tream of dye within a cooperating dye chamber for producing a second, different beam is generally disclosed herein along with a specific arrangement including an optical fiber and a fiber optics interface for directing the pumping beam into the dye chamber. The specific fiber optics interface illustrated includes three cooperating lenses which together image one particular dimension of the pumping beam into the dye chamber from the output end of the optical fiber in order to insure that the dye chamber is properly illuminated by the pumping beam.

Abstract: Method and apparatus for spreading and angle-encoding each pulse of a multiplicity of small area, short pulses into several temporally staggered pulses by use of appropriate beam splitters, with the optical elements being arranged so that each staggered pulse is contiguous with one or two other such pulses, and the entire sequence of stacked pulses comprising a single, continuous long pulse. The single long pulse is expanded in area, and then doubly passed through a nonstorage laser amplifier such as KrF. After amplification, the physically separated, angle-encoded and temporally staggered pulses are recombined into a single pulse of short duration. This high intensity output beam is well collimated and may be propagated over long distance, or used for irradiating inertial confinement fusion targets.