Patents by Inventor Lynn Renee Allen

Lynn Renee Allen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and equipment for anisotropic, patterned conversion of copper into selectively removable compounds and for removal of same
    Patent number: 5736002
    Abstract: Methods and equipment for anisotropic, patterned conversion of copper into selectively removable compounds and for removal of the same are disclosed. In one embodiment a plasma reactor is used to anisotropically convert unmasked portions of a copper layer at low temperature into copper chloride. The copper chloride is removed by one or more of the following steps: (1) solvation by a solvent specific to the copper chloride; (2) vaporizing the copper chloride away; and (3) converting the copper chloride into a volatile, secondary compound. In another embodiment an ion implanter is used to anisotropically convert desired portions of a copper layer into copper oxide. The copper oxide is removed by one or more of the following steps: (1) solvation by a solvent specific to the copper oxide; (2) vaporizing the copper oxide away; and (3) converting the copper oxide into a volatile, secondary compound.
    Type: Grant
    Filed: August 22, 1994
    Date of Patent: April 7, 1998
    Assignees: Sharp Microelectronics Technology, Inc., Sharp Kabushiki Kaisha
    Inventors: Lynn Renee Allen, John Martin Grant