Patents by Inventor Lynn YANG

Lynn YANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHAMBER CLEANING PROCESS
    Publication number: 20200020512
    Abstract: A method and apparatus for obtaining at least one normalized baseline spectrum for a processing volume of a processing chamber; calculating a distribution value of the normalized baseline spectrum; obtaining a plurality of normalized cleaning process spectrums; calculating a distribution function of the plurality of normalized cleaning process spectrums; comparing the distribution value to the distribution function; and determining an end point by identifying when the distribution function approaches the distribution value.
    Type: Application
    Filed: July 13, 2018
    Publication date: January 16, 2020
    Inventors: Weiting CHEN, Lynn YANG, Christy PAN, Beom Soo PARK, Young-Jin CHOI, Max CHANG