Patents by Inventor M. Amir Fardad

M. Amir Fardad has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Solvent-assisted lithographic process using photosensitive sol-gel derived glass for depositing ridge waveguides on silicon
    Patent number: 6054253
    Abstract: The process for fabricating a ridge waveguide on a substrate uses a photosensitive sol-gel glass material prepared, according to a first embodiment, by mixing methacryloxypropyltrimethoxysilane (H.sub.2 C.dbd.C(CH.sub.3)CO.sub.2 (CH.sub.2).sub.3 Si(OCH.sub.3).sub.3) and methacrylic acid (H.sub.2 C.dbd.C(CH.sub.3)COOH) or, according to a second embodiment, by mixing methacryloxypropyltrimethoxysilane (H.sub.2 C.dbd.C(CH.sub.3)CO.sub.2 (CH.sub.2).sub.3 Si(OCH.sub.3).sub.3) with bis(s-butoxy)aluminoxytriethoxysilane. A thick film of photosensitive sol-gel glass material is first dip coated on at least a portion of the substrate. A photomask is applied to the film of photosensitive sol-gel glass material, and this sol-gel material is exposed to ultraviolet radiation through the opening(s) of the photomask to render a portion of the film insoluble to a given solvent and thereby imprint the ridge waveguide in that film.
    Type: Grant
    Filed: October 10, 1997
    Date of Patent: April 25, 2000
    Assignee: McGill University-The Royal Institute for the Advancement of Learning
    Inventors: M. Amir Fardad, S. Iraj Najafi, Mark P. Andrews