Abstract: An apparatus includes a wafer stage and a particle removing assembly. The wafer stage includes a cup adjacent to a wafer chuck. The particle removing assembly is configured to remove contaminant particles from the cup. In some embodiments, the particle removing assembly comprises a flexible ejecting member that includes one or more elongated tubes, a front tip, and a cleaning tip adapter configured to attach the front tip to each of the one or more elongated tubes. The front tip includes front openings and lateral openings from which pressurized cleaning material are introduced onto an unreachable area of the cup to remove the contaminant particles from the cup.

Abstract: The present invention is directed to a pencil sharpener that incorporates a conductive sharpening blade element for sharpening the pencil wherein the blade element is positioned along an inner wall surface of a bore hole so as to contact an outer surface of the pencil. A conductive leaf spring opposingly positioned with the blade element contacts a nib of a pencil when the pencil is sharpened by the blade element, whereby the leaf spring forms an electrical contact with the blade element through the nib of the pencil. An integrated circuit sound device for producing an audible signal is operatively connected with the blade element and leaf spring so as to generate warning signals through an indicating lamp and a buzzer.