Abstract: Various MEMS filter elements or modules are disclosed. One such MEMS filter module (34) includes a first film (70) and a second film (46) that are spaced and interconnected by a plurality of supports (78). A plurality of first flow ports (74) extend through the first film (70), and a plurality of second flow ports (50) extend through the second film (46). A plurality of annular filter walls (54) extend from the second film (46) toward the first film (70), and are separated therefrom by a filter trap gap (58). A filter trap chamber (62) is disposed on each side of each filter trap gap (58). Therefore, fluid will flow into one filter trap chamber (62), through a filter trap gap (58), and into another filter trap chamber (62), whether the flow is introduced into the filter module (34) through the first flow ports (74) or the second flow ports (50).

Abstract: One embodiment of a MEMS flow module (34) includes a first plate (36) and a second plate (48) that are separated by a first link (62). A plurality of concentrically disposed, annular flow-restricting walls (40) extend from the first plate (36), and each are separated from the second plate (48) by a flow-restricting gap (58). When the MEMS flow module (34) is exposed to a differential pressure and in one configuration, a perimeter (46) of the first plate (36) flexes away from the second plate (48) (and at least generally about where the first link (62) interfaces with the first plate (36)) to increase the size of one or more of the flow-restricting gaps (58), to in turn accommodate an increased flow or flow rate through the MEMS flow module (34).

Abstract: A bidirectional flow MEMS filter module (40) is disclosed that uses a plurality of concentrically disposed filtering walls (60). The MEMS filter module (40) includes a first plate (44) having a plurality of first flow ports (48), as well as a second plate (52) having a plurality of second flow ports (56) that is spaced from and interconnected with the first plate (44). The above-noted filtering walls (60) extend from the second plate (52) at least toward the first plate (44). The first plate (44) and each filtering wall (60) are spaced from each other to define a filter trap (64). All flow through the MEMS filter module (40) must pass through at least one filter trap (64) prior to exiting the MEMS filter module (40), either through one or more of the first flow ports (48) or through one or more of the second flow ports (56).

Abstract: Various embodiments of MEMS flow modules that regulate flow or pressure by the axial movement of a flow regulating or controlling structure are disclosed. One such MEMS flow module (40) has a regulator (66) that is aligned with and spaced from a first flow port (52) through a first plate (50). The regulator (66) is structurally interconnected with a flexible third plate (80). When the regulator (66) experiences at least a certain differential pressure, the regulator (66) moves at least generally axially away from the first plate (50) by a flexing of the third plate (80) at least generally away from the first plate (50). Increasing the spacing between the regulator (66) and the first plate (50) accommodates an increased flow or flow rate through the MEMS flow module (40).

Abstract: Various embodiments of MEMS flow modules that regulate flow or pressure by the pivoting or pivoting-like movement of a flow regulating or controlling structure are disclosed. One such MEMS flow module (40) has a flow regulating structure (62) including a plurality of baffles (66) and a flow plate (50) including a plurality of flow ports (52). The flow regulating structure (62) also has a support (64) that is spaced from and anchored to the flow plate (50). Each baffle (66) is aligned with at least one flow port (52) and is interconnected to the support (64) of the flow regulating structure (62) in a manner that allows the baffles (66) to flex away from the flow plate (50) based upon the development of at least a certain differential pressure across the MEMS flow module (40).

Abstract: An integral conduit (407) in the formed of stepped tubing defines at least part of a drainage flow path (408/408?) that accommodates a flow rate of at least about 0.15 microliters/minute/mm2/mm-Hg out of the anterior chamber (284) of the eye (266). One or more flow modules (415) may be disposed within this drainage flow path (408/048?) and are located exteriorly of the eye (266). Each flow module (415) may be in the form of a filter or a pressure regulator. In one embodiment, one flow module (415) in the form of a filter is used in combination with another flow module (415) in the form of a pressure regulator.

Abstract: Various embodiments of MEMS flow modules that may be disposed in a flow path (296) of a shunt (290) are disclosed, where the shunt (290) may be used to control a flow out of an anterior chamber (284) of an eye (266). One such MEMS flow module (58) has a tuning element (78) and a lower plate (70). A plurality of springs or spring-like structures (82) interconnect the tuning element (78) with the lower plate (70) in a manner that allows the tuning element (78) to move either toward or away from the lower plate (70), depending upon the pressure being exerted on the tuning element (78) by a flow through a lower flow port (74) on the lower plate (70). The tuning element (78) is disposed over this lower flow port (74) to induce a flow through the MEMS flow module (58) along a non-linear (geometrically) flow path.

Abstract: Various MEMS filter elements or modules are disclosed, and which may be used in a glaucoma implant (490). One such MEMS filter module (34) includes a first film (70) and a second film (46) that are spaced and interconnected by a plurality of supports (78). A plurality of first flow ports (74) extend through the first film (70), and a plurality of second flow ports (50) extend through the second film (46). A plurality of annular filter walls (54) extend from the second film (46) toward the first film (70), and are separated therefrom by a filter trap gap (58).

Abstract: Various MEMS filter elements or modules are disclosed. One such MEMS filter module (34) includes a first film (70) and a second film (46) that are spaced and interconnected by a plurality of supports (78). A plurality of first flow ports (74) extend through the first film (70), and a plurality of second flow ports (50) extend through the second film (46). A plurality of annular filter walls (54) extend from the second film (46) toward the first film (70), and are separated therefrom by a filter trap gap (58). A filter trap chamber (62) is disposed on each side of each filter trap gap (58). Therefore, fluid will flow into one filter trap chamber (62), through a filter trap gap (58), and into another filter trap chamber (62), whether the flow is introduced into the filter module (34) through the first flow ports (74) or the second flow ports (50).

Abstract: Various methods for forming surface micromachined microstructures are disclosed. One aspect relates to executing surface micromachining operation to structurally reinforce at least one structural layer in a microstructure. Another aspect relates to executing the surface micromachining operation to form a plurality of at least generally laterally extending etch release channels within a sacrificial material to facilitate the release of the corresponding microstructure.