Patents by Inventor M. Sciacca

M. Sciacca has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SELECTIVE SALICIDATION METHODS
    Publication number: 20050282370
    Abstract: Methods for selective salicidation of a semiconductor device. The invention implements a chemical surface pretreatment by immersion in ozonated water H2O prior to metal deposition. The pretreatment forms an interfacial layer that prevents salicidation over an n-type structure. As a result, the invention does not add any additional process steps to the conventional salicidation processing.
    Type: Application
    Filed: June 21, 2004
    Publication date: December 22, 2005
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Russell Arndt, Kenneth Giewont, Kevin Mello, M. Sciacca