Patents by Inventor Maarten HOLTRUST

Maarten HOLTRUST has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Patent number: 11762304
    Abstract: A lithographic apparatus has: a conduit through which a gas can flow; a gas mover configured to cause the gas to flow in the conduit; a wall in contact with the gas in the conduit and defining a membrane aperture therein; and an acoustic filter including a flexible membrane fixed in the membrane aperture. The acoustic filter reduces transmission of acoustic disturbances without adding any flow resistance.
    Type: Grant
    Filed: March 29, 2016
    Date of Patent: September 19, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Güneş Nak{dot over (i)}boğlu, Maarten Holtrust, Martinus Van Duijnhoven, Francis Fahrni, Frank Johannes Jacobus Van Boxtel, Anne Willemijn Bertine Quist, Bart Dinand Paarhuis, Daan Daniel Johannes Antonius Van Sommeren
  • Cleaning device and method of cleaning
    Patent number: 11086239
    Abstract: A cleaning device for an apparatus for processing production substrates, the cleaning device including: a body having dimensions similar to the production substrates so that the cleaning device is compatible with the apparatus, the body having a first major surface and a second major surface facing in the opposite direction to the first major surface; a chamber within the body configured to accommodate contaminants; an inlet from the first major surface to the chamber and configured to allow contaminants to be drawn into the chamber by a flow of fluid; and an outlet from the chamber to the second major surface, the cleaning device being configured to allow the fluid to exit the chamber but to prevent a contaminant leaving the chamber.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: August 10, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Miao Yu, Petrus Martinus Gerardus Johannes Arts, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Maarten Holtrust, Han Henricus Aldegonda Lempens, Ferdy Migchelbrink, Theodorus Wilhelmus Polet, Gheorghe Tanasa
  • CLEANING DEVICE AND METHOD OF CLEANING
    Publication number: 20210116824
    Abstract: A cleaning device for an apparatus for processing production substrates, the cleaning device including: a body having dimensions similar to the production substrates so that the cleaning device is compatible with the apparatus, the body having a first major surface and a second major surface facing in the opposite direction to the first major surface; a chamber within the body configured to accommodate contaminants; an inlet from the first major surface to the chamber and configured to allow contaminants to be drawn into the chamber by a flow of fluid; and an outlet from the chamber to the second major surface, the cleaning device being configured to allow the fluid to exit the chamber but to prevent a contaminant leaving the chamber.
    Type: Application
    Filed: March 13, 2019
    Publication date: April 22, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Miao YU, Petrus, Martinus, Gerardus, Jothannes ARTS, Erik, Henricus, Egidius, Catharina EUMMELEN, Giovanni Luca GATTOBIGIO, Maarten HOLTRUST, Han, Henricus, Aldegonda LEMPENS, Ferdy MIGCHELBRINK, Theodorus Wilhelmus POLET, Gheorghe TANASA
  • LITHOGRAPHIC APPARATUS
    Publication number: 20180299796
    Abstract: A lithographic apparatus has: a conduit through which a gas can flow; a gas mover configured to cause the gas to flow in the conduit; a wall in contact with the gas in the conduit and defining a membrane aperture therein; and an acoustic filter including a flexible membrane fixed in the membrane aperture. The acoustic filter reduces transmission of acoustic disturbances without adding any flow resistance.
    Type: Application
    Filed: March 29, 2016
    Publication date: October 18, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Günes NAKIBOGLU, Maarten HOLTRUST, Martinus VAN DUIJNHOVEN, Francis FAHRNI, Frank Johannes Jacobus VAN BOXTEL, Anne Willemijn Bertine QUIST, Bart Dinand PAARHUIS, Daan Daniel Johannes VAN SOMMEREN