Patents by Inventor Maarten Jan HEERKENS

Maarten Jan HEERKENS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RESIDUAL GAS ANALYSER
    Publication number: 20230384276
    Abstract: Disclosed herein is a residual gas analyser for detecting gas in a vacuum tool, the residual gas analyser comprising: one or more ion sources configured to ionise a gas in the residual gas analyser; one or more detectors configured to detect an ionised gas by the ion source; and one or more gas generating filaments configured to generate gas within the residual gas analyser.
    Type: Application
    Filed: September 27, 2021
    Publication date: November 30, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Reinier Theodorus Martinus JILISEN, Maarten Jan HEERKENS, Hendrikus Petrus KLUIJTMANS, Robbert Willem Frederik OOSTERBAAN, Antonius Marinus Coenraad Petrus Leonardus VAN DE KERKHOF