Patents by Inventor Maarten Lambertus Henricus TER HEERDT

Maarten Lambertus Henricus TER HEERDT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam inspection tool and method of controlling heat load
    Patent number: 11158484
    Abstract: An e-beam inspection tool is disclosed, the tool comprising, an electron optics system configured to generate an electron beam, an object table configured to hold a specimen, a positioning device configured to position the object table, the positioning device comprising an actuator, wherein the positioning device further comprises a heating device configured to generate a heat load and a heat load controller to control the generated heat load at least partly based on an actuator heat load generated in the actuator.
    Type: Grant
    Filed: February 28, 2020
    Date of Patent: October 26, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Dennis Herman Caspar Van Banning, Jeroen Gerard Gosen, Maarten Lambertus Henricus Ter Heerdt, Edwin Cornelis Kadijk
  • ELECTRON BEAM INSPECTION TOOL AND METHOD OF CONTROLLING HEAT LOAD
    Publication number: 20200203117
    Abstract: An e-beam inspection tool is disclosed, the tool comprising, an electron optics system configured to generate an electron beam, an object table configured to hold a specimen, a positioning device configured to position the object table, the positioning device comprising an actuator, wherein the positioning device further comprises a heating device configured to generate a heat load and a heat load controller to control the generated heat load at least partly based on an actuator heat load generated in the actuator.
    Type: Application
    Filed: February 28, 2020
    Publication date: June 25, 2020
    Inventors: Dennis Herman Caspar VAN BANNING, Jeroen Gerard GOSEN, Maarten Lambertus Henricus TER HEERDT, Edwin Cornelis KADIJK