Patents by Inventor Madhusudhanan JAMBUNATHAN

Madhusudhanan JAMBUNATHAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor mark and a method of manufacturing a sensor mark
    Patent number: 10976196
    Abstract: A sensor mark including: a substrate having: a deep ultra violet (DUV) radiation absorbing layer including a first material which substantially absorbs DUV radiation; and a protecting layer including a second material, wherein: the DUV radiation absorbing layer has a through hole in it; the protecting layer is positioned, in plan, in the through hole and the protecting layer in the through hole has a patterned region having a plurality of through holes; and the second material is more noble than the first material.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: April 13, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Joost André Klugkist, Vadim Yevgenyevich Banine, Johan Franciscus Maria Beckers, Madhusudhanan Jambunathan, Maxim Aleksandrovich Nasalevich, Andrey Nikipelov, Roland Johannes Wilhelmus Stas, David Ferdinand Vles, Wilhelmus Jacobus Johannes Welters, Sandro Wricke
  • SENSOR MARK AND A METHOD OF MANUFACTURING A SENSOR MARK
    Publication number: 20200064183
    Abstract: A sensor mark including: a substrate having: a deep ultra violet (DUV) radiation absorbing layer including a first material which substantially absorbs DUV radiation; and a protecting layer including a second material, wherein: the DUV radiation absorbing layer has a through hole in it; the protecting layer is positioned, in plan, in the through hole and the protecting layer in the through hole has a patterned region having a plurality of through holes; and the second material is more noble than the first material.
    Type: Application
    Filed: February 15, 2018
    Publication date: February 27, 2020
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Joost André KLUGKIST, Vadim Yevgenyevich BANINE, Johan Franciscus Maria BECKERS, Madhusudhanan JAMBUNATHAN, Maxim Aleksandrovich NASALEVICH, Andrey NIKIPELOV, Roland Johannes Wilhelmus STAS, David Ferdinand VLES, Wilhelmus Jacobus Johannes WELTERS, Sandro WRICKE