Abstract: A device for bio-sensing applications is disclosed, comprising a substrate such as a semiconductor chip having Cu electrodes thereon, and a self assembled monolayer bonded to at least one of the Cu electrodes, wherein molecules of the self-assembled monolayer comprise a head group which bonds to Cu, a carbon-comprising chain comprising a chain of at least 12 C atoms, and a terminal group which is hydrophilic and for binding a bio-receptor. The terminal group is hydrophilic to allow binding to the bio-receptor, and inclusion of the carbon-comprising chain, limits or avoids corrosion of the copper. Also disclosed is a method of providing such a device, activating the terminal group and coupling a bio-receptor to the activated terminal group. Disclosure further extends to use of such a device for bio-sensing applications.

Abstract: Disclosed is a sensor device (10) comprising a substrate (100) carrying a sensing element (110), and a metallization stack on said substrate for providing interconnections to said sensing element, the metallization stack comprising a plurality of patterned metal layers (130a-d) separated by insulating layers (120a-d), wherein a first metal layer (130c) comprises an electrode portion (16) conductively connected to the sensing element, and a further metal layer (130d) facing the first metal layer comprises a reference electrode portion (18), the electrode portion and the reference electrode portion being separated by a fluid channel (14) accessible from the top of the metallization stack. A method of manufacturing such a sensor device is also disclosed.