Patents by Inventor Mahendran Chidambaram

Mahendran Chidambaram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11964343
    Abstract: A process of producing optical devices is provided including transferring a first substrate comprising one or more devices to a laser dicing tool, the laser dicing tool including a filamentation stage and a singulation stage. One or more device contours are created on the first substrate in the filamentation stage. The optical devices are singulated from the first substrate along the one or more device contours in the singulation stage. The devices are transferred to storage or for further backend processing.
    Type: Grant
    Filed: February 24, 2021
    Date of Patent: April 23, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Mahendran Chidambaram, Shmuel Erez, Wei-Sheng Lei, John Rusconi
  • Patent number: 11878532
    Abstract: Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: January 23, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Daihua Zhang, Ludovic Godet, Michael David-Scott Kemp, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Bahubali S. Upadhye, Hemantha Raju, John Rusconi, Elsa Massonneau, Mahendran Chidambaram, Alexey Stepanov, Visweswaren Sivaramakrishnan
  • Patent number: 11807008
    Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: November 7, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Daihua Zhang, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Elsa Massonneau, Alexey Stepanov, Ludovic Godet, Mahendran Chidambaram, Visweswaren Sivaramakrishnan, Bahubali S. Upadhye, Hemantha Raju
  • Publication number: 20230229086
    Abstract: A method and apparatus for curing a substrate are described. The apparatus includes a curing apparatus with a casing and an ultraviolet (UV) radiation assembly coupled to the casing. The ultraviolet radiation assembly further includes a line UV radiation source. The casing includes an opening on one end. A substrate passes by the opening and is exposed to the UV radiation of the line UV radiation source. The curing apparatus further includes a purge assembly configured to continuously purge the process volume and the volume directly above the exposed portion of the substrate. The curing apparatus is configured to only cure a portion of the substrate at any one point in time, such that the curing apparatus is a scanning curing apparatus and includes a small process volume.
    Type: Application
    Filed: December 21, 2022
    Publication date: July 20, 2023
    Inventors: Michael David-Scott KEMP, Daihua ZHANG, Ludovic GODET, Mahendran CHIDAMBARAM, Sumedh Dattatraya ACHARYA
  • Publication number: 20230123795
    Abstract: A method and apparatus for dicing optical devices from a substrate are described herein. The method includes the formation of a plurality of trenches using radiation pulses delivered to the substrate. The radiation pulses are delivered in a pattern to form trenches with varying depth as the trenches extend outward from a top surface of the optical device. The varying depth of the trenches provides edges of each of the optical devices which are slanted. The radiation pulses are UV radiation pulses and are delivered in bursts around the silhouette of the optical devices.
    Type: Application
    Filed: September 15, 2022
    Publication date: April 20, 2023
    Inventors: Wei-Sheng LEI, Zhengping YAO, Mahendran CHIDAMBARAM, Kangkang WANG, Zhihong John LIN, Ludovic GODET, Visweswaren SIVARAMAKRISHNAN
  • Publication number: 20230113276
    Abstract: Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line-shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.
    Type: Application
    Filed: September 16, 2022
    Publication date: April 13, 2023
    Inventors: Wei-Sheng LEI, Girish Kumar GOPALAKRISHNAN NAIR, Kent Qiujing ZHAO, Daniel STOCK, Tobias STOLLEY, Thomas DEPPISCH, Jean DELMAS, Kenneth S. LEDFORD, Subramanya P. HERLE, Kiran VACHHANI, Mahendran CHIDAMBARAM, Roland TRASSL, Neil MORRISON, Frank SCHNAPPENBERGER, Kevin Laughton CUNNINGHAM, Stefan BANGERT, James CUSHING, Visweswaren SIVARAMAKRISHNAN
  • Publication number: 20230002268
    Abstract: A method and apparatus for substrate dicing are described. The method includes utilizing a laser to dice a substrate along a dicing path to form a perforated line around each device within the substrate. The dicing path is created by exposing the substrate to bursts of laser pulses at different locations around each device. The laser pulses are delivered to the substrate and may have a pulse repetition frequency of greater than about 25 MHz, a pulse width of less than about 15 picoseconds, and a laser wavelength of about 1.0 ?m to about 5 ?m.
    Type: Application
    Filed: June 9, 2022
    Publication date: January 5, 2023
    Inventors: Wei-Sheng LEI, Mahendran CHIDAMBARAM, Kangkang WANG, Ludovic GODET, Visweswaren SIVARAMAKRISHNAN
  • Patent number: 11518100
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one light source configured to generate a first light beam and a second light beam, a polygon mirror scanner, an actuator, and a galvo mirror scanner. The polygon mirror scanner is configured to receive the first light beam and reflect the first light beam towards the platform. Rotation of the first polygon mirror causes the light beam to move in a first direction along a path on a layer of feed material on the platform. The actuator is configured to cause the path to move along a second direction at a non-zero angle relative to the first direction. The galvo mirror scanner system is configured to receive the second light beam and reflect the second light beam toward the platform.
    Type: Grant
    Filed: May 9, 2019
    Date of Patent: December 6, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Wei-Sheng Lei, Mahendran Chidambaram, Visweswaren Sivaramakrishnan, Kashif Maqsood
  • Publication number: 20220363060
    Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.
    Type: Application
    Filed: January 12, 2022
    Publication date: November 17, 2022
    Inventors: Daihua ZHANG, Kang LUO, Kazuya DAITO, Kenneth S. LEDFORD, Elsa MASSONNEAU, Alexey STEPANOV, Ludovic GODET, Mahendran CHIDAMBARAM, Visweswaren SIVARAMAKRISHNAN, Bahubali S. UPADHYE, Hemantha RAJU
  • Publication number: 20220362995
    Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 17, 2022
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Publication number: 20220363064
    Abstract: Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.
    Type: Application
    Filed: January 12, 2022
    Publication date: November 17, 2022
    Inventors: Daihua ZHANG, Ludovic Godet, Michael David-Scott Kemp, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Bahubali S. Upadhye, Hemantha Raju, John Rusconi, Elsa Massonneau, Mahendran Chidambaram, Alexey Stepanov, Visweswaren Sivaramakrishnan
  • Publication number: 20220305588
    Abstract: Embodiments of the present disclosure relate to methods for dicing one or more optical devices from a substrate with a laser machining system. The laser machining system utilizes a laser to perform methods for dicing one or more optical devices from a substrate along a dicing path. The methods use one of forming a plurality of laser spots along the dicing path or forming a plurality of trenches along the dicing path.
    Type: Application
    Filed: March 21, 2022
    Publication date: September 29, 2022
    Inventors: Wei-Sheng LEI, Mahendran Chidambaram, Kangkang Wang, Ludovic Godet, Visweswaren Sivaramakrishnan
  • Publication number: 20220281168
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The exhaust unit includes a plenum having a port connected to a gas return conduit, and a gas collector that is open at a front end to receive gas from over the platform and has a concave plate at a back end of the gas collector. An aperture is formed at a back of the concave plate between the gas collector and the plenum to provide a constricted flow path for gas from the collector to the plenum.
    Type: Application
    Filed: May 23, 2022
    Publication date: September 8, 2022
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Patent number: 11413817
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The inlet unit includes a multi-chamber plenum, a gas inlet, and a gas distribution module. The multi-chamber plenum has a plurality of vertically stacked chambers that are fluidically connected, with a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: August 16, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Patent number: 11400649
    Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: August 2, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Patent number: 11203153
    Abstract: A powder bin for an additive manufacturing apparatus has a plurality of walls forming an annular body to surround a build plate. The plurality of walls include an annular outer wall and an annular inner wall that are separated by a cavity, and a gap between a top edge of the inner wall and a top edge of the outer wall is configured to receive powder between the top edges of the outer walls and the inner walls. The annular body has an aperture that extends laterally through the inner wall and outer wall. A base is connected to a bottom edge of the outer wall and a bottom edge of the inner wall, and the base includes one or more ports. A sloped barrier is positioned in the cavity configured to direct powder around the aperture to the one or more ports in the base.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: December 21, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Erez Shmuel, Mahendran Chidambaram
  • Publication number: 20210276129
    Abstract: A process of producing optical devices is provided including transferring a first substrate comprising one or more devices to a laser dicing tool, the laser dicing tool including a filamentation stage and a singulation stage. One or more device contours are created on the first substrate in the filamentation stage. The optical devices are singulated from the first substrate along the one or more device contours in the singulation stage. The devices are transferred to storage or for further backend processing.
    Type: Application
    Filed: February 24, 2021
    Publication date: September 9, 2021
    Inventors: Mahendran CHIDAMBARAM, Shmuel EREZ, Wei-Sheng LEI, John RUSCONI
  • Publication number: 20210260826
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one light source configured to generate a first light beam and a second light beam, a polygon minor scanner, an actuator, and a galvo minor scanner. The polygon minor scanner is configured to receive the first light beam and reflect the first light beam towards the platform. Rotation of the first polygon mirror causes the light beam to move in a first direction along a path on a layer of feed material on the platform. The actuator is configured to cause the path to move along a second direction at a non-zero angle relative to the first direction. The galvo mirror scanner system is configured to receive the second light beam and reflect the second light beam toward the platform.
    Type: Application
    Filed: May 9, 2019
    Publication date: August 26, 2021
    Inventors: Wei-Sheng LEI, Mahendran CHIDAMBARAM, Visweswaren SIVARAMAKRISHNAN, Kashif MAQSOOD
  • Publication number: 20210107222
    Abstract: A powder bin for an additive manufacturing apparatus has a plurality of walls forming an annular body to surround a build plate. The plurality of walls include an annular outer wall and an annular inner wall that are separated by a cavity, and a gap between a top edge of the inner wall and a top edge of the outer wall is configured to receive powder between the top edges of the outer walls and the inner walls. The annular body has an aperture that extends laterally through the inner wall and outer wall. A base is connected to a bottom edge of the outer wall and a bottom edge of the inner wall, and the base includes one or more ports. A sloped barrier is positioned in the cavity configured to direct powder around the aperture to the one or more ports in the base.
    Type: Application
    Filed: October 15, 2019
    Publication date: April 15, 2021
    Inventors: Erez Shmuel, Mahendran Chidambaram
  • Publication number: 20210107223
    Abstract: An additive manufacturing apparatus includes an annular powder bin to surround a build plate, a support structure to hold the build plate in an interior of the powder bin, and a kinematic mount assembly for the support structure. The kinematic mount assembly includes at least three independently vertically kinematic mounts that support the support structure, and one or more actuators to independently control vertical motion of the kinematic mounts to control a tilt angle of the support structure and build plate.
    Type: Application
    Filed: October 15, 2019
    Publication date: April 15, 2021
    Inventors: Erez Shmuel, Mahendran Chidambaram