Patents by Inventor Mahendran Chidambaram
Mahendran Chidambaram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11964343Abstract: A process of producing optical devices is provided including transferring a first substrate comprising one or more devices to a laser dicing tool, the laser dicing tool including a filamentation stage and a singulation stage. One or more device contours are created on the first substrate in the filamentation stage. The optical devices are singulated from the first substrate along the one or more device contours in the singulation stage. The devices are transferred to storage or for further backend processing.Type: GrantFiled: February 24, 2021Date of Patent: April 23, 2024Assignee: Applied Materials, Inc.Inventors: Mahendran Chidambaram, Shmuel Erez, Wei-Sheng Lei, John Rusconi
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Patent number: 11878532Abstract: Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.Type: GrantFiled: January 12, 2022Date of Patent: January 23, 2024Assignee: Applied Materials, Inc.Inventors: Daihua Zhang, Ludovic Godet, Michael David-Scott Kemp, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Bahubali S. Upadhye, Hemantha Raju, John Rusconi, Elsa Massonneau, Mahendran Chidambaram, Alexey Stepanov, Visweswaren Sivaramakrishnan
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Patent number: 11807008Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.Type: GrantFiled: January 12, 2022Date of Patent: November 7, 2023Assignee: Applied Materials, Inc.Inventors: Daihua Zhang, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Elsa Massonneau, Alexey Stepanov, Ludovic Godet, Mahendran Chidambaram, Visweswaren Sivaramakrishnan, Bahubali S. Upadhye, Hemantha Raju
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Publication number: 20230229086Abstract: A method and apparatus for curing a substrate are described. The apparatus includes a curing apparatus with a casing and an ultraviolet (UV) radiation assembly coupled to the casing. The ultraviolet radiation assembly further includes a line UV radiation source. The casing includes an opening on one end. A substrate passes by the opening and is exposed to the UV radiation of the line UV radiation source. The curing apparatus further includes a purge assembly configured to continuously purge the process volume and the volume directly above the exposed portion of the substrate. The curing apparatus is configured to only cure a portion of the substrate at any one point in time, such that the curing apparatus is a scanning curing apparatus and includes a small process volume.Type: ApplicationFiled: December 21, 2022Publication date: July 20, 2023Inventors: Michael David-Scott KEMP, Daihua ZHANG, Ludovic GODET, Mahendran CHIDAMBARAM, Sumedh Dattatraya ACHARYA
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Publication number: 20230123795Abstract: A method and apparatus for dicing optical devices from a substrate are described herein. The method includes the formation of a plurality of trenches using radiation pulses delivered to the substrate. The radiation pulses are delivered in a pattern to form trenches with varying depth as the trenches extend outward from a top surface of the optical device. The varying depth of the trenches provides edges of each of the optical devices which are slanted. The radiation pulses are UV radiation pulses and are delivered in bursts around the silhouette of the optical devices.Type: ApplicationFiled: September 15, 2022Publication date: April 20, 2023Inventors: Wei-Sheng LEI, Zhengping YAO, Mahendran CHIDAMBARAM, Kangkang WANG, Zhihong John LIN, Ludovic GODET, Visweswaren SIVARAMAKRISHNAN
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Publication number: 20230113276Abstract: Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line-shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.Type: ApplicationFiled: September 16, 2022Publication date: April 13, 2023Inventors: Wei-Sheng LEI, Girish Kumar GOPALAKRISHNAN NAIR, Kent Qiujing ZHAO, Daniel STOCK, Tobias STOLLEY, Thomas DEPPISCH, Jean DELMAS, Kenneth S. LEDFORD, Subramanya P. HERLE, Kiran VACHHANI, Mahendran CHIDAMBARAM, Roland TRASSL, Neil MORRISON, Frank SCHNAPPENBERGER, Kevin Laughton CUNNINGHAM, Stefan BANGERT, James CUSHING, Visweswaren SIVARAMAKRISHNAN
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Publication number: 20230002268Abstract: A method and apparatus for substrate dicing are described. The method includes utilizing a laser to dice a substrate along a dicing path to form a perforated line around each device within the substrate. The dicing path is created by exposing the substrate to bursts of laser pulses at different locations around each device. The laser pulses are delivered to the substrate and may have a pulse repetition frequency of greater than about 25 MHz, a pulse width of less than about 15 picoseconds, and a laser wavelength of about 1.0 ?m to about 5 ?m.Type: ApplicationFiled: June 9, 2022Publication date: January 5, 2023Inventors: Wei-Sheng LEI, Mahendran CHIDAMBARAM, Kangkang WANG, Ludovic GODET, Visweswaren SIVARAMAKRISHNAN
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Patent number: 11518100Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one light source configured to generate a first light beam and a second light beam, a polygon mirror scanner, an actuator, and a galvo mirror scanner. The polygon mirror scanner is configured to receive the first light beam and reflect the first light beam towards the platform. Rotation of the first polygon mirror causes the light beam to move in a first direction along a path on a layer of feed material on the platform. The actuator is configured to cause the path to move along a second direction at a non-zero angle relative to the first direction. The galvo mirror scanner system is configured to receive the second light beam and reflect the second light beam toward the platform.Type: GrantFiled: May 9, 2019Date of Patent: December 6, 2022Assignee: Applied Materials, Inc.Inventors: Wei-Sheng Lei, Mahendran Chidambaram, Visweswaren Sivaramakrishnan, Kashif Maqsood
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Publication number: 20220363060Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.Type: ApplicationFiled: January 12, 2022Publication date: November 17, 2022Inventors: Daihua ZHANG, Kang LUO, Kazuya DAITO, Kenneth S. LEDFORD, Elsa MASSONNEAU, Alexey STEPANOV, Ludovic GODET, Mahendran CHIDAMBARAM, Visweswaren SIVARAMAKRISHNAN, Bahubali S. UPADHYE, Hemantha RAJU
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Publication number: 20220362995Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.Type: ApplicationFiled: July 20, 2022Publication date: November 17, 2022Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
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Publication number: 20220363064Abstract: Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.Type: ApplicationFiled: January 12, 2022Publication date: November 17, 2022Inventors: Daihua ZHANG, Ludovic Godet, Michael David-Scott Kemp, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Bahubali S. Upadhye, Hemantha Raju, John Rusconi, Elsa Massonneau, Mahendran Chidambaram, Alexey Stepanov, Visweswaren Sivaramakrishnan
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Publication number: 20220305588Abstract: Embodiments of the present disclosure relate to methods for dicing one or more optical devices from a substrate with a laser machining system. The laser machining system utilizes a laser to perform methods for dicing one or more optical devices from a substrate along a dicing path. The methods use one of forming a plurality of laser spots along the dicing path or forming a plurality of trenches along the dicing path.Type: ApplicationFiled: March 21, 2022Publication date: September 29, 2022Inventors: Wei-Sheng LEI, Mahendran Chidambaram, Kangkang Wang, Ludovic Godet, Visweswaren Sivaramakrishnan
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Publication number: 20220281168Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The exhaust unit includes a plenum having a port connected to a gas return conduit, and a gas collector that is open at a front end to receive gas from over the platform and has a concave plate at a back end of the gas collector. An aperture is formed at a back of the concave plate between the gas collector and the plenum to provide a constricted flow path for gas from the collector to the plenum.Type: ApplicationFiled: May 23, 2022Publication date: September 8, 2022Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
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Patent number: 11413817Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The inlet unit includes a multi-chamber plenum, a gas inlet, and a gas distribution module. The multi-chamber plenum has a plurality of vertically stacked chambers that are fluidically connected, with a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers.Type: GrantFiled: November 14, 2019Date of Patent: August 16, 2022Assignee: Applied Materials, Inc.Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
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Patent number: 11400649Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.Type: GrantFiled: November 14, 2019Date of Patent: August 2, 2022Assignee: Applied Materials, Inc.Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
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Patent number: 11203153Abstract: A powder bin for an additive manufacturing apparatus has a plurality of walls forming an annular body to surround a build plate. The plurality of walls include an annular outer wall and an annular inner wall that are separated by a cavity, and a gap between a top edge of the inner wall and a top edge of the outer wall is configured to receive powder between the top edges of the outer walls and the inner walls. The annular body has an aperture that extends laterally through the inner wall and outer wall. A base is connected to a bottom edge of the outer wall and a bottom edge of the inner wall, and the base includes one or more ports. A sloped barrier is positioned in the cavity configured to direct powder around the aperture to the one or more ports in the base.Type: GrantFiled: October 15, 2019Date of Patent: December 21, 2021Assignee: Applied Materials, Inc.Inventors: Erez Shmuel, Mahendran Chidambaram
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Publication number: 20210276129Abstract: A process of producing optical devices is provided including transferring a first substrate comprising one or more devices to a laser dicing tool, the laser dicing tool including a filamentation stage and a singulation stage. One or more device contours are created on the first substrate in the filamentation stage. The optical devices are singulated from the first substrate along the one or more device contours in the singulation stage. The devices are transferred to storage or for further backend processing.Type: ApplicationFiled: February 24, 2021Publication date: September 9, 2021Inventors: Mahendran CHIDAMBARAM, Shmuel EREZ, Wei-Sheng LEI, John RUSCONI
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Publication number: 20210260826Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one light source configured to generate a first light beam and a second light beam, a polygon minor scanner, an actuator, and a galvo minor scanner. The polygon minor scanner is configured to receive the first light beam and reflect the first light beam towards the platform. Rotation of the first polygon mirror causes the light beam to move in a first direction along a path on a layer of feed material on the platform. The actuator is configured to cause the path to move along a second direction at a non-zero angle relative to the first direction. The galvo mirror scanner system is configured to receive the second light beam and reflect the second light beam toward the platform.Type: ApplicationFiled: May 9, 2019Publication date: August 26, 2021Inventors: Wei-Sheng LEI, Mahendran CHIDAMBARAM, Visweswaren SIVARAMAKRISHNAN, Kashif MAQSOOD
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Publication number: 20210107222Abstract: A powder bin for an additive manufacturing apparatus has a plurality of walls forming an annular body to surround a build plate. The plurality of walls include an annular outer wall and an annular inner wall that are separated by a cavity, and a gap between a top edge of the inner wall and a top edge of the outer wall is configured to receive powder between the top edges of the outer walls and the inner walls. The annular body has an aperture that extends laterally through the inner wall and outer wall. A base is connected to a bottom edge of the outer wall and a bottom edge of the inner wall, and the base includes one or more ports. A sloped barrier is positioned in the cavity configured to direct powder around the aperture to the one or more ports in the base.Type: ApplicationFiled: October 15, 2019Publication date: April 15, 2021Inventors: Erez Shmuel, Mahendran Chidambaram
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Publication number: 20210107223Abstract: An additive manufacturing apparatus includes an annular powder bin to surround a build plate, a support structure to hold the build plate in an interior of the powder bin, and a kinematic mount assembly for the support structure. The kinematic mount assembly includes at least three independently vertically kinematic mounts that support the support structure, and one or more actuators to independently control vertical motion of the kinematic mounts to control a tilt angle of the support structure and build plate.Type: ApplicationFiled: October 15, 2019Publication date: April 15, 2021Inventors: Erez Shmuel, Mahendran Chidambaram