Patents by Inventor Mahesh Arcot
Mahesh Arcot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240117491Abstract: Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes: an oven having an enclosure that defines an interior volume configured to house the plurality of gas lines, the enclosure having a door configured for transferring the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the enclosure; a plurality of exhaust ports disposed through a second wall of the enclosure; a fluid panel disposed outside of the oven and coupled to the plurality of inlet ports via corresponding ones of a plurality of fluid distribution assemblies; and a foreline disposed outside of the oven and coupled to the plurality of exhaust ports.Type: ApplicationFiled: October 7, 2022Publication date: April 11, 2024Inventors: Hanish Kumar PANAVALAPPIL KUMARANKUTTY, Yogesh TOMAR, Nikshep M. PATIL, Hari Venkatesh RAJENDRAN, Kirubanandan Naina SHANMUGAM, Gayatri NATU, Mahesh ARCOT, Senthil Kumar NATTAMAI SUBRAMANIAN, Steven D. MARCUS, Michael R. RICE
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Patent number: 11192153Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.Type: GrantFiled: July 30, 2018Date of Patent: December 7, 2021Assignee: Applied Materials, Inc.Inventors: Sankesha Bhoyar, Mahesh Arcot, Nilesh Chimanrao Bagul, Hemantha Raju, Ravindra Patil
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Publication number: 20180339314Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.Type: ApplicationFiled: July 30, 2018Publication date: November 29, 2018Applicant: APPLIED MATERIALS, INC.Inventors: Sankesha Bhoyar, Mahesh Arcot, Nilesh Chimanrao Bagul, Hemantha Raju, Ravindra Patil
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Patent number: 10081036Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.Type: GrantFiled: September 19, 2016Date of Patent: September 25, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Sankesha Bhoyar, Mahesh Arcot, Nilesh Chimanrao Bagul, Hemantha Raju, Ravindra Patil
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Publication number: 20180078975Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.Type: ApplicationFiled: September 19, 2016Publication date: March 22, 2018Inventors: Sankesha Bhoyar, Mahesh Arcot, Nilesh Chimanrao Bagul, Hemantha Raju, Ravindra Patil
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Publication number: 20130074771Abstract: A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.Type: ApplicationFiled: November 20, 2012Publication date: March 28, 2013Inventors: VICTOR L. PUSHPARAJ, Pravin K. Narwankar, Dieter Haas, Bipin Thakur, Mahesh Arcot, Vikas Gujar, Omkaram Nalamasu
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Patent number: 8334017Abstract: A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.Type: GrantFiled: September 17, 2010Date of Patent: December 18, 2012Assignee: Applied Materials, Inc.Inventors: Victor L. Pushparaj, Pravin K. Narwankar, Dieter Haas, Bipin Thakur, Mahesh Arcot, Vikas Gujar, Omkaram Nalamasu
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Publication number: 20110100955Abstract: A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.Type: ApplicationFiled: September 17, 2010Publication date: May 5, 2011Applicant: Applied Materials, Inc.Inventors: VICTOR L. PUSHPARAJ, Pravin K. Narwankar, Dieter Haas, Bipin Thakur, Mahesh Arcot, Vikas Gujar, Omkaram Nalamasu