Patents by Inventor Mahito Kajihara

Mahito Kajihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum process apparatus and vacuum processing method
    Patent number: 5611655
    Abstract: A vacuum process apparatus includes a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed, at least one preliminary vacuum chamber connected to the convey chamber through a loading/unloading port, a plurality of vacuum process chambers connected to the convey chamber through the loading/unloading ports and each having a vacuum process mechanism, a plurality of gate valves for opening/closing the plurality of loading/unloading ports, and a multi-joint arm member, arranged in the convey chamber, for conveying the target object between the convey chamber and the vacuum process chambers, and between the convey chamber and the preliminary chamber. The convey chamber is evacuated through a bearing for a pivot shaft of the multi-joint arm member.
    Type: Grant
    Filed: January 4, 1996
    Date of Patent: March 18, 1997
    Assignees: Tokyo Electron Limited, Tokyo Electron Yamanashi Limited
    Inventors: Yoshio Fukasawa, Shozo Hosoda, Tatsuya Nakagome, Takashi Tozawa, Koji Suzuki, Yasumasa Ishihara, Minoru Aoyagi, Mahito Kajihara