Abstract: An apparatus and a method are described to dry solid objects being manufactured in a chain of steps. The apparatus contains a cartridge to hold the objects, a chamber to house the cartridge, nozzle sections to spray drying agents on the objects, and a vacuum section to remove the drying agent and the released solvent. The apparatus also contains an optical radiation source such as an IR lamp for heating the objects, which can be used in conjunction with the vacuum section for removing solvent and drying steps. The cartridge or the nozzles can be swayed changing the orientation of the objects and the nozzles. The spraying step and evacuating steps can be repeated as needed.

Abstract: Methods for using and/or storing a pellicle-reticle assembly that does not result in the formation of haze on the reticle and/or the formation of wrinkles on the pellicle.

Abstract: Optical waveguides with power monitoring or optical detection capabilities are disclosed. The waveguide includes a lower cladding, a core disposed on the lower cladding, an upper cladding disposed on the core and a trench extending transversely through a distal end of the lower cladding, core and upper cladding. The trench includes a distal wall that provides a reflective surface disposed at an angle relative to the end of the core of greater than 90°. A detector is disposed above the trench for receiving a reflected light beam off of the reflective surface. Various methods of manufacturing these devices are also disclosed.

Abstract: Thermal optical switch apparatus with enhanced thermal isolation includes a cladding region with first and second spaced apart waveguide cores buried therein to form first and second waveguides. A thermal insulation barrier filled with insulating material is formed in the cladding between the first and second waveguides to thermally isolate the waveguides. In one embodiment, the insulating material is an aerogel. Methods of operation are also described.

Abstract: A single integrated wafer may be formed with optical components on one side and electronic components on the opposite side. Communication between the sides may be by way of optical signals that may be transmitted through the semiconductor wafer.

Abstract: A planar light wave circuit may have thin film filters integrated into the planar light circuit. Waveguides formed in the planar light wave circuit may convey light transmitted from and reflected by the thin film filters. A variety of optical devices may be formed with the hybrid technology.

Abstract: Optical waveguides with power monitoring or optical detection capabilities are disclosed. The waveguide includes a lower cladding, a core disposed on the lower cladding, an upper cladding disposed on the core and a trench extending transversely through a distal end of the lower cladding, core and upper cladding. The trench includes a distal wall that provides a reflective surface disposed at an angle relative to the end of the core of greater than 90°. A detector is disposed above the trench for receiving a reflected light beam off of the reflective surface. Various methods of manufacturing these devices are also disclosed.

Abstract: Thermal optical switch apparatus with enhanced thermal isolation includes a cladding region with first and second spaced apart waveguide cores buried therein to form first and second waveguides. A thermal insulation barrier filled with insulating material is formed in the cladding between the first and second waveguides to thermally isolate the waveguides. In one embodiment, the insulating material is an aerogel. Methods of operation are also described.

Abstract: A method of streamlining and lowering the cost of operation of ion chromatography as well as improving detection limits is disclosed. The apparatus includes chromatographic separating means through which a sample is eluted in an eluent solution including an electrolyte. The apparatus includes suppressor means having a chromatography effluent compartment means separated from a detector effluent compartment means by an ion exchange membrane, forming a chromatography effluent flow channel and a detector effluent channel, respectively. Electrode means are disposed in communication with both flow channels for passing an electric current transverse to the solution that is passing through them. The chromatography effluent flows through the chromatography effluent flow channel of the suppressor and through detector means which detects resolved ionic species therein.

Abstract: A method of streamlining and lowering the cost of operation of ion chromatography as well as improving detection limits is disclosed. The apparatus includes chromatographic separating means through which a sample is eluted in an eluent solution including an electrolyte. The apparatus includes suppressor means having a chromatography effluent compartment means separated from a detector effluent compartment means by an ion exchange membrane, forming a chromatography effluent flow channel and a detector effluent channel, respectively. Electrode means are disposed in communication with both flow channels for passing an electric current transverse to the solution that is passing through them. The chromatography effluent flows through the chromatography effluent flow channel of the suppressor and through detector means which detects resolved ionic species therein.