Abstract: The present disclosure describes an intermittency-based analyte sensor and a method for using the intermittency-based analyte sensor. The intermittency-based analyte sensor includes a microcantilever, a substrate, a plurality of electrodes, a contact pad and a microcontroller. The microcantilever has a micromechanical beam having has a fixed end and a free end. The substrate is connected to the fixed end of the micromechanical beam. The plurality of electrodes are configured to connect to a biased source of alternating voltage. The frequency of the alternating voltage is in a frequency range which generates intermittencies in a motion of the free end. The microcontroller monitors a frequency response of the micromechanical beam; compares the frequency response to a calibration curve, and provides an alert that an analyte has deposited on the surface of the micromechanical beam when the frequency response is less than a calibrated frequency response.

Abstract: Methods, apparatus and systems are described as relating to electrostatic sensors for detection in micro or nano electromechanical systems. In exemplary embodiments, a sensor for detecting a threshold value of is provided. The sensor includes a deformable member with a mass detection area, an electrostatic actuator having first and second plates, the first plate being connected to the mass detection area, and a voltage source connected to each of the first and second plate. The operating voltage being proximate to a local bifurcation point of the electrostatic sensor for the first and second plates to pull-in together. Upon an external mass having the threshold value appearing on the mass detection area, the local bifurcation point of the electrostatic sensor is shifted such that the first and second plates will pull in to contact each other by movement of the deformable member to signal detection.