Patents by Inventor Mahmut Sami KAVRIK

Mahmut Sami KAVRIK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a protective coating film for halide plasma resistance
    Patent number: 11118263
    Abstract: A method of forming a protective coating film for halide plasma resistance includes depositing a seed layer on a surface of an article via an atomic layer deposition (ALD) process, depositing a rare-earth containing oxide layer on the seed layer via an ALD process, and exposing the rare-earth containing oxide layer to fluorine-containing plasma.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: September 14, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Yogita Pareek, Kevin A. Papke, Emily Sierra Thomson, Mahmut Sami Kavrik, Andrew C. Kummel
  • COATING FOR HALIDE PLASMA RESISTANCE
    Publication number: 20200354833
    Abstract: A method of forming a protective coating film for halide plasma resistance includes depositing a seed layer on a surface of an article via an atomic layer deposition (ALD) process, depositing a rare-earth containing oxide layer on the seed layer via an ALD process, and exposing the rare-earth containing oxide layer to fluorine-containing plasma.
    Type: Application
    Filed: May 10, 2019
    Publication date: November 12, 2020
    Inventors: Yogita PAREEK, Kevin A. PAPKE, Emily Sierra THOMSON, Mahmut Sami KAVRIK, Andrew C. KUMMEL