Patents by Inventor Mahn-Jick Lim

Mahn-Jick Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming silicon dioxide
    Patent number: 4002512
    Abstract: A method of depositing a layer comprising SiO.sub.2 on a surface of a substrate at a rate which is temperature independent is disclosed. The method includes combining dichlorosilane (SiH.sub.2 Cl.sub.2) with an oxidizing gas, such as O.sub.2, CO.sub.2, N.sub.2 O, H.sub.2 O, to form SiO.sub.2.
    Type: Grant
    Filed: April 14, 1975
    Date of Patent: January 11, 1977
    Assignee: Western Electric Company, Inc.
    Inventor: Mahn-Jick Lim
  • Method of etching a surface of a substrate comprising LiTaO.sub.3 and chemically similar materials
    Patent number: RE29336
    Abstract: A method of etching a surface of a substrate comprising lithium tantalate (LiTaO.sub.3) and chemically similar materials is disclosed. The method includes contacting the surface with a mixture comprising hydrofluoric acid and sulfuric acid. In addition to its etching action, the mixture is also capable of polishing the thus treated surface.
    Type: Grant
    Filed: December 17, 1976
    Date of Patent: August 2, 1977
    Assignee: Western Electric Company, Inc.
    Inventor: Mahn-Jick Lim