Patents by Inventor Maike BERGELER

Maike BERGELER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below
    Patent number: 12146125
    Abstract: The invention relates to the use of a composition comprising a C1 to C6 alkanol and a carboxylic acid ester of formula (I) wherein R1 is selected from a C1 to C6 alkyl, which may be unsubstituted or substituted by OH or F, and —X21—[O—X22]n—H; R2 is selected from a C1 to C6 alkyl, which may be unsubstituted or substituted by OH or F, and —X21—[O—X22]n—H; X21, X22 are independently selected from C1 to C6 alkandiyl, which may be unsubstituted or substituted by OH or F; n is an integer from 1 to 5. wherein, the C1 to C6 alkanol and the carboxylic acid ester are selected so as to form an azeotropic mixture and are present in an amount from 20% by weight below to 20% by weight above such azeotropic mixture.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: November 19, 2024
    Assignee: BASF SE
    Inventors: Marcel Brill, Daniel Loeffler, Yeni Burk, Frank Pirrung, Lothar Engelbrecht, Szilard Csihony, Maike Bergeler, Volodymyr Boyko, Patrick Wilke
  • COMPOSITION FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW COMPRISING A BORON-TYPE ADDITIVE
    Publication number: 20220187712
    Abstract: Described herein is a non-aqueous composition including (a) an organic solvent, and (b) at least one additive of formulae I, where R1, R2, R3, and R4 are independently selected from C1 to C10 alkyl, C1 to C11 alkylcarbonyl, C6 to C12 aryl, C7 to C14 alkylaryl, and C7 to C14 arylalkyl; and n is 0 or 1.
    Type: Application
    Filed: April 3, 2020
    Publication date: June 16, 2022
    Inventors: Szilard Csihony, Daniel Loeffler, Marcel Brill, Frank Pirrung, Lothar Engelbrecht, Maike Bergeler, Paatrick Wilke, Yeni Burk, Volodymyr Boyko
  • USE OF COMPOSITIONS COMPRISING A SOLVENT MIXTURE FOR AVOIDING PATTERN COLLAPSE WHEN TREATING PATTERNED MATERIALS WITH LINE-SPACE DIMENSIONS OF 50 NM OR BELOW
    Publication number: 20210198602
    Abstract: The invention relates to the use of a composition comprising a C1 to C6 alkanol and a carboxylic acid ester of formula (I) wherein R1 is selected from a C1 to C6 alkyl, which may be unsubstituted or substituted by OH or F, and —X21—[O—X22]n—H; R2 is selected from a C1 to C6 alkyl, which may be unsubstituted or substituted by OH or F, and —X21—[O—X22]n—H; X21, X22 are independently selected from C1 to C6 alkandiyl, which may be unsubstituted or substituted by OH or F; n is an integer from 1 to 5. wherein, the C1 to C6 alkanol and the carboxylic acid ester are selected so as to form an azeotropic mixture and are present in an amount from 20% by weight below to 20% by weight above such azeotropic mixture.
    Type: Application
    Filed: May 13, 2019
    Publication date: July 1, 2021
    Applicant: BASF SE
    Inventors: Marcel BRILL, Daniel LOEFFLER, Yeni BURK, Frank PIRRUNG, Lothar ENGELBRECHT, Szilard CSIHONY, Maike BERGELER, Volodymyr BOYKO, Patrick WILKE