Abstract: A substrate supporting apparatus includes a pallet on which a substrate is mounted, a pallet double-end holding mechanism holding both ends of the pallet in a diameter direction while the pallet is in a vertical posture, a pallet center holding mechanism rotatably holding a center section of the pallet, and a moving mechanism moving an apparatus body, wherein the pallet double-end holding mechanism is a mechanism that grips both ends of the pallet in the diameter direction from both sides of a thickness direction, the pallet double-end holding mechanism holds the pallet during movement, the pallet is held by both of the holding mechanisms during delivery from the pallet double-end holding mechanism to the pallet center holding mechanism, and the pallet center holding mechanism rotatably holds the center section of the pallet and holding by the pallet double-end holding mechanism is released during substrate processing.

Abstract: Productivity is improved by ensuring reliability of palette holding and reliability of operations.