Abstract: The invention provides an observation system capable of observing a formation position of a target shape that cannot be directly irradiated with an electron beam. The observation system includes an electron microscope and a computer. The electron microscope is configured to irradiate, with an electron beam, a first surface position on a specimen, which is different from a formation position of a target shape on the specimen, detect predetermined electrons that are scattered in the specimen from the first surface position and that escape from the formation position of the target shape to an outside of the specimen, and output the predetermined electrons as a detection signal. The computer is configured to output one or more values related to the target shape based on the detection signal.

Abstract: A method for evaluating a pattern formed on a surface of a semiconductor wafer includes: setting a feature space including a plurality of features that are calculatable from sensing data of the pattern; and calculating, in the feature space, a deviation as a vector between a coordinate in the feature space calculated from an evaluation object and a coordinate of a reference point or in a reference space in the feature space set in advance as a comparison object.

Abstract: A dental care composition including an isothiocyanate having a sulfinyl group (—S(?O)—), a sulphonyl group (—S(?O)2—), a sulfide bond (—S—), or an aryl group, and an isothiocyanate group (—N?C?S). And, a composition used to promote activation of a TRPA1 channel and to promote activation of a reaction catalyzed by carbonic anhydrase.

Abstract: The invention provides an observation system capable of observing a formation position of a target shape that cannot be directly irradiated with an electron beam. The observation system includes an electron microscope and a computer. The electron microscope is configured to irradiate, with an electron beam, a first surface position on a specimen, which is different from a formation position of a target shape on the specimen, detect predetermined electrons that are scattered in the specimen from the first surface position and that escape from the formation position of the target shape to an outside of the specimen, and output the predetermined electrons as a detection signal. The computer is configured to output one or more values related to the target shape based on the detection signal.

Abstract: To provide a technique capable of quantitatively grasping a change in three-dimensional shape including a cross-sectional shape of a pattern within a surface of a wafer or between wafers in a non-destructive manner before cross-sectional observation.

Abstract: An pattern evaluation method includes a step of estimating imaging deviation allowed to evaluate an overlay position on one or more evaluation point candidates based on pattern layout information, a step of deciding one or more evaluation points from among the evaluation point candidates based on the allowed imaging deviation, a step of deciding an imaging sequence for imaging the selected evaluation point, and a step of evaluating an overlay position between first and second patterns based on an image obtained by imaging the evaluation point according to the imaging sequence.

Abstract: A charged particle microscope system with a charged particle microscope including an irradiation unit that irradiates a subject to be inspected with a charged particle beam and a detection unit having a detector that detects a charged particle signal from the subject to be inspected irradiated by the irradiation unit; a signal processing unit that converts the charged particle signal detected by the detector of the charged particle microscope into an image signal; and an arithmetic processing unit that corrects the image signal converted by the signal processing unit with the use of signal conversion characteristics.

Abstract: An pattern evaluation method includes a step of estimating imaging deviation allowed to evaluate an overlay position on one or more evaluation point candidates based on pattern layout information, a step of deciding one or more evaluation points from among the evaluation point candidates based on the allowed imaging deviation, a step of deciding an imaging sequence for imaging the selected evaluation point, and a step of evaluating an overlay position between first and second patterns based on an image obtained by imaging the evaluation point according to the imaging sequence.

Abstract: An outgo time of first customers in a service providing store such as a restaurant is estimated and is notified to a second customer who made a reservation without time designation. Information relative to a usage amount of money of the first customers in a restaurant is obtained, and an accumulated usage amount of money per customer is calculated. Then, it is judged whether the accumulated usage amount of money per customer exceeds a predetermined reference amount of money. If a second customer makes a reservation for a reservation unit including the seat of the first customers and it is judged that the accumulated usage amount of money of the customer exceeds the predetermined reference amount of money, an outgo time of the first customers, which is obtained by adding a reference time to a time, is notified to the second customer. Thus, the second customer can go to the restaurant in view of the outgo time.

Abstract: An outgo time of first customers in a service providing store such as a restaurant is estimated and is notified to a second customer who made a reservation without time designation. Information relative to a usage amount of money of the first customers in a restaurant is obtained, and an accumulated usage amount of money per customer is calculated. Then, it is judged whether the accumulated usage amount of money per customer exceeds a predetermined reference amount of money. If a second customer makes a reservation for a reservation unit including the seat of the first customers and it is judged that the accumulated usage amount of money of the customer exceeds the predetermined reference amount of money, an outgo time of the first customers, which is obtained by adding a reference time to a time, is notified to the second customer. Thus, the second customer can go to the restaurant in view of the outgo time.